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Surface morphology of titanium nitride thin films synthesized by DC reactive magnetron sputtering


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[1] XU X., YE H., ZOU T., J. Zhejiang Univ.-Sci. A, 7 (3) (2006), 472.10.1631/jzus.2006.A0472Search in Google Scholar

[2] LECLAIR P. R., PhD. Thesis: Titanium Nitride thin films by the electron shower process, Massachusetts Institute of Technology, USA, 1998.Search in Google Scholar

[3] BAVADI R., VALEDBAGI S., Mater. Phys. Mech., 15 (2012), 167.Search in Google Scholar

[4] PANKIEW A., BUNJONGPRU W., SOMWANG N., PORNTHEERAPHAT S., SOPITPAN S., NUKAEW J., HRUANUN C., POYA A., J. Micros. Soc. Thail., 24 (2) (2010), 103.Search in Google Scholar

[5] TAO M., UDESHI D., AGARWAL S., MALDONADO E., Solid State Electron., 48 (2004), 335.10.1016/S0038-1101(03)00316-2Search in Google Scholar

[6] SMITH G.B., BEN-DAVID A., SWIFT P.D., Renew. Energ., 22 (1 - 3) (2001), 79.10.1016/S0960-1481(00)00071-9Search in Google Scholar

[7] VAZ F., CERQUEIRA P., REBOUTA L., NASCIMENTO S.M. C., ALVES E., GOUDEAU P.H., RIVIERE J.P., PISCHOW K., DE RIJK J., Thin Solid Films, 447 - 448 (2004), 449.10.1016/S0040-6090(03)01123-4Search in Google Scholar

[8] BORAH S.M., PAL A.R., BAILUNG H., CHUTIA J., Appl. Surf. Sci., 254 (18) (2008), 5760.10.1016/j.apsusc.2008.03.047Search in Google Scholar

[9] SERRO A.P., COMPLETO C., COLAÇO R., DOS SANTOS F., DA SILVA C. LOBATO, CABRAL J.M. S., ARAÚJO H., PIRES E., SARAMAGO B., Surf. Coat. Tech., 203 (24) (2009), 3701.10.1016/j.surfcoat.2009.06.010Search in Google Scholar

[10] CHOU W.J., YU G.P., HUANG J.H., Surf. Coat. Tech., 140 (3) (2001), 206.10.1016/S0257-8972(01)01120-3Search in Google Scholar

[11] TAMURA M., KUBO H., Surf. Coat. Tech., 49 (1 - 3) (1991), 194.10.1016/0257-8972(91)90054-ZSearch in Google Scholar

[12] CHAWLA V., JAYAGANTHAN R., CHANDRA R., Mater. Charact., 59 (2008), 1015.10.1016/j.matchar.2007.08.017Search in Google Scholar

[13] GELALI A., AHMADPOURIAN A., BAVADI R., HANTEHZADEH M.R., AHMADPOURIAN A., J. Fusion Energ., 31 (2012), 586.10.1007/s10894-012-9510-zSearch in Google Scholar

[14] HANTEHZADEH M.R., BAVADI R., SARI A.H., GHORANNEVISS M., J. Fusion Energ., 30 (4) (2011), 333.10.1007/s10894-011-9383-6Search in Google Scholar

[15] MountainsMap®7 Software (Digital Surf, Besançon, France). Available at: http://www.digitalsurf.fr (last accessed on September 10, 2014).Search in Google Scholar

[16] ZOLOTAREVSKII S.Y., NOVIKOV D.A., GUSEV A.S., LYASKOVSKII V.L., Meas. Tech.+, 56 (3) (2013), 247.10.1007/s11018-013-0188-zSearch in Google Scholar

[17] ALMTOFT K.P., PhD Thesis: Structural characterization of nanocrystalline thin films grown by magnetron sputtering, University of Aarhus, Denmark, 2006.Search in Google Scholar

[18] YADAV R.P., DWIVEDI S., MITTAL A.K., KUMAR M., PANDEY A.C., Appl. Surf. Sci., 261 (2012), 547.10.1016/j.apsusc.2012.08.053Search in Google Scholar

[19] ŢĂLU Ş., GHAZAI A. J., STACH S., HASSAN A., HASSAN Z., ¸T˘ALU M., J. Mater. Sci.-Mater. El., 25 (1) (2014), 466.10.1007/s10854-013-1611-6Search in Google Scholar

[20] DALLAEVA D., ŢǍLU Ş., STACH S., ŠKARVADA P., TOMÁNEK P., GRMELA L., Appl. Surf. Sci., 312 (2014), 81.10.1016/j.apsusc.2014.05.086Search in Google Scholar

[21] ŢĂLU Ş., STACH S., ZAHARIEVA J., MILANOVA M., TODOROVSKY D., GIOVANZANA S., Int. J. Polym. Anal. Ch., 19 (5) (2014), 404.10.1080/1023666X.2014.904149Search in Google Scholar

[22] ŢĂLU Ş., Anim. Biol. Anim. Husb., 4 (2012), 1.Search in Google Scholar

[23] ŢĂLU Ş., STACH S., IKRAM M., PATHAK D., WAGNER T., NUNZI J.-M., Int. J. Nanosci., (2014). DOI: 10.1142/S0219581X14500203.10.1142/S0219581X14500203Search in Google Scholar

[24] STACH S., ROSKOSZ S., CYBO J., CWAJNA J., Mater. Charact., 60 (2009), 1151.10.1016/j.matchar.2009.02.013Search in Google Scholar

[25] CHHABRA A., JENSEN R.V., Phys. Rev. Lett., 62 (1989), 1327.10.1103/PhysRevLett.62.132710039645Search in Google Scholar

[26] LOU S., JIANG X., SCOTT P.J., Measurement, 46 (2) (2013), 1002.10.1016/j.measurement.2012.09.015Search in Google Scholar

[27] STATISTICA software, version 12 (StatSoft Inc., USA). Available at: http://www.statsoft.com (last accessed on September 10, 2014).Search in Google Scholar

eISSN:
2083-134X
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Inglés
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4 veces al año
Temas de la revista:
Materials Sciences, other, Nanomaterials, Functional and Smart Materials, Materials Characterization and Properties