Influence of magnetron powering mode on various properties of TiO2 thin films
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01. Feb. 2019
Über diesen Artikel
Online veröffentlicht: 01. Feb. 2019
Seitenbereich: 748 - 760
Eingereicht: 08. Nov. 2018
Akzeptiert: 24. Nov. 2018
DOI: https://doi.org/10.2478/msp-2018-0099
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© 2018 Artur Wiatrowski et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
Wiatrowski, Artur
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and PhotonicsWroclaw, Poland
Mazur, Michał
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and PhotonicsWroclaw, Poland
Obstarczyk, Agata
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and PhotonicsWroclaw, Poland
Kaczmarek, Danuta
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and PhotonicsWroclaw, Poland
Pastuszek, Roman
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and PhotonicsWroclaw, Poland
Wojcieszak, Damian
Wroclaw University of Science and Technology, Faculty of Microsystem Electronics and PhotonicsWroclaw, Poland
Grobelny, Marcin
Motor Transport Institute, Centre for Material TestingWarsaw, Poland
Kalisz, Małgorzata
Motor Transport Institute, Centre for Material TestingWarsaw, Poland