Preparation of laser induced periodic surface structures for gas sensing thin films and gas sensing verification of a NiO based sensor structure
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10. Feb. 2024
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Online veröffentlicht: 10. Feb. 2024
Seitenbereich: 24 - 28
Eingereicht: 01. Dez. 2023
DOI: https://doi.org/10.2478/jee-2024-0004
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© 2024 Ivan Hotovy et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
This study presents different approaches to increase the sensing area of NiO based semiconducting metal oxide gas sensors. Micro- and nanopatterned laser induced periodic surface structures (LIPSS) are generated on silicon and Si/SiO2 substrates. The surface morphologies of the fabricated samples are examined by FE SEM. We select the silicon samples with an intermediate Si3N4 layer due to its superior isolation quality over the thermal oxide for evaluating the hydrogen and acetone sensitivity of a NiO based test sensor.