<abstract xmlns="http://www.w3.org/1999/xhtml">

This study presents different approaches to increase the sensing area of NiO based semiconducting metal oxide gas sensors. Micro- and nanopatterned laser induced periodic surface structures (LIPSS) are generated on silicon and Si/SiO2 substrates. The surface morphologies of the fabricated samples are examined by FE SEM. We select the silicon samples with an intermediate Si3N4 layer due to its superior isolation quality over the thermal oxide for evaluating the hydrogen and acetone sensitivity of a NiO based test sensor.
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This study presents different approaches to increase the sensing area of NiO based semiconducting metal oxide gas sensors. Micro- and nanopatterned laser induced periodic surface structures (LIPSS) are generated on silicon and Si/SiO2 substrates. The surface morphologies of the fabricated samples are examined by FE SEM. We select the silicon samples with an intermediate Si3N4 layer due to its superior isolation quality over the thermal oxide for evaluating the hydrogen and acetone sensitivity of a NiO based test sensor.

Preparation of laser induced periodic surface structures for gas sensing thin films and gas sensing verification of a NiO based sensor structure

Vorarlberg University of Applied Sciences

Journal of Electrical Engineering

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

This study presents different approaches to increase the sensing area of NiO based semiconducting metal oxide gas sensors. Micro- and nanopatterned laser...

Preparation of laser induced periodic surface structures for gas sensing thin films and gas sensing verification of a NiO based sensor structure

Online veröffentlicht: 10. Feb. 2024

Seitenbereich: 24 - 28

Eingereicht: 01. Dez. 2023

DOI: https://doi.org/10.2478/jee-2024-0004

Schlüsselwörter
laser ablation, laser induced periodic surface structure, NiO, gas sensing

© 2024 Ivan Hotovy et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Preparation of laser induced periodic surface structures for gas sensing thin films and gas sensing verification of a NiO based sensor structure

Online veröffentlicht: 10. Feb. 2024

Seitenbereich: 24 - 28

Eingereicht: 01. Dez. 2023

DOI: https://doi.org/10.2478/jee-2024-0004

Schlüsselwörterlaser ablation, laser induced periodic surface structure, NiO, gas sensing

© 2024 Ivan Hotovy et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Schlüsselwörter
laser ablation, laser induced periodic surface structure, NiO, gas sensing