Electrical performance estimation and comparative study of heterojunction strained and conventional gate all around nanosheet field effect transistors
Online veröffentlicht: 14. Dez. 2023
Seitenbereich: 503 - 512
Eingereicht: 02. Okt. 2023
DOI: https://doi.org/10.2478/jee-2023-0058
Schlüsselwörter
© 2023 Reza Abbasnezhad et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
In this paper, we propose a novel type of Gate All Around Nanosheet Field Effect Transistor (GAA NS FET) that incorporates source heterojunctions and strained channels and substrate. We compare its electrical characteristics with those of the Heterojunction Gate All Around Nanosheet Field Effect Transistor (Heterojunction GAA NS FET) and the Conventional Gate All Around Nanosheet Field Effect Transistor (Conventional GAA NS FET). We investigate the impact of electrostatic control on both DC and analog parameters such as gate capacitance (