Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications
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18. Mai 2018
Über diesen Artikel
Online veröffentlicht: 18. Mai 2018
Seitenbereich: 56 - 68
Eingereicht: 13. März 2017
Akzeptiert: 08. Dez. 2017
DOI: https://doi.org/10.1515/msp-2017-0109
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© 2018
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
Oleśko, Katarzyna
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924Lodz, Poland
Szymanowski, Hieronim
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924Lodz, Poland
Gazicki-Lipman, Maciej
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924Lodz, Poland
Balcerzak, Jacek
Department of Molecular Engineering, Faculty of Process and Environmental Engineering, Lodz University of Technology, Wolczanska 213, 90-924Lodz, Poland
Ski, Witold Szymań
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924Lodz, Poland
Pawlak, Wojciech
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924Lodz, Poland
Sobczyk-Guzenda, Anna
Institute of Materials Science and Engineering, Lodz University of Technology, Stefanowskiego 1/15, 90-924Lodz, Poland