<abstract xmlns="http://www.w3.org/1999/xhtml"><p>PDMS (polydimethylsiloxane) collapse method is a simple and low cost approach for micronanochannel fabrication. However, the bonding pressure which influences the size of the final PDMS micro/nanochannels has not yet been studied. In this study, the effect of the bonding pressure on the size and maximum local stress of the PDMS micronanochannels was investigated by both experimental and numerical simulation method. The results show that when the bonding pressure is lower than 0.15 MPa the experiment results can agree well with the simulation results. The fluorescent images demonstrate that there is no blocking or leakage over the entire micro/nanochannels.</p></abstract>

PDMS (polydimethylsiloxane) collapse method is a simple and low cost approach for micronanochannel fabrication. However, the bonding pressure which influences the size of the final PDMS micro/nanochannels has not yet been studied. In this study, the effect of the bonding pressure on the size and maximum local stress of the PDMS micronanochannels was investigated by both experimental and numerical simulation method. The results show that when the bonding pressure is lower than 0.15 MPa the experiment results can agree well with the simulation results. The fluorescent images demonstrate that there is no blocking or leakage over the entire micro/nanochannels.

Experimental and Numerical Study on PDMS Collapse for Fabrication of Micro/Nanochannels

School of Mechanical Science and Engineering, Jilin University, Changchun 130012,

Key Laboratory for Micro/Nano Technology and Systems of Liaoning Province, Dalian University of Technology, Dalian 116024,

Journal of Electrical Engineering

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

PDMS (polydimethylsiloxane) collapse method is a simple and low cost approach for micronanochannel fabrication. However, the bonding pressure which influences...

Experimental and Numerical Study on PDMS Collapse for Fabrication of Micro/Nanochannels

Online veröffentlicht: 30. Dez. 2016

Seitenbereich: 414 - 420

Eingereicht: 01. Sept. 2016

DOI: https://doi.org/10.1515/jee-2016-0060

Schlüsselwörter
PDMS collapse, micro/nanochannel, bonding, numerical simulation

© 2016 Faculty of Electrical Engineering and Information Technology, Slovak University of Technology

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Experimental and Numerical Study on PDMS Collapse for Fabrication of Micro/Nanochannels

Online veröffentlicht: 30. Dez. 2016

Seitenbereich: 414 - 420

Eingereicht: 01. Sept. 2016

DOI: https://doi.org/10.1515/jee-2016-0060

SchlüsselwörterPDMS collapse, micro/nanochannel, bonding, numerical simulation

© 2016 Faculty of Electrical Engineering and Information Technology, Slovak University of Technology

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Schlüsselwörter
PDMS collapse, micro/nanochannel, bonding, numerical simulation