About this article
Published Online: Jul 22, 2009
Page range: 50 - 54
DOI: https://doi.org/10.2478/v10047-009-0009-y
Keywords
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Thin films of amorphous Si on glass were crystallized by pulsed nano- and picosecond lasers. Two methods for creating the desired patterns of crystallized regions were used. In the former, the pattern is produced by a focused laser beam, and in the latter it is made using a prefabricated mask. The electric conductivity of crystallized films increases by more than 4 orders of magnitude in comparison with untreated amorphous films.