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Materials Science-Poland
Volume 31 (2013): Issue 4 (October 2013)
Open Access
Application of triton X-100 surfactant for silicon anisotropic etching in KOH-based solutions
Krzysztof Rola
Krzysztof Rola
and
Irena Zubel
Irena Zubel
| Dec 15, 2013
Materials Science-Poland
Volume 31 (2013): Issue 4 (October 2013)
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Published Online:
Dec 15, 2013
Page range:
525 - 530
DOI:
https://doi.org/10.2478/s13536-013-0130-8
© 2013 Wroclaw University of Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
Krzysztof Rola
Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372, Wrocław, Poland
Irena Zubel
Faculty of Microsystem Electronics and Photonics, Wrocław University of Technology, Janiszewskiego 11/17, 50-372, Wrocław, Poland