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Generating Sub-nanometer Displacement Using Reduction Mechanism Consisting of Torsional Leaf Spring Hinges

,

Hayashi, Masato

and

Marita, Sintaro

Mar 06, 2014

Generating Sub-nanometer Displacement Using Reduction Mechanism Consisting of Torsional Leaf Spring Hinges's Cover Image

Measurement Science Review

Volume 14 (2014): Issue 1 (February 2014)

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Published Online: Mar 06, 2014

Page range: 48 - 51

DOI: https://doi.org/10.2478/msr-2014-0008

Keywords
Sub-nanometer displacement, reduction mechanism, torsional leaf spring hinge, displacement standard, AFM verification

This content is open access.

Language:: English

Publication timeframe:: 6 times per year
Journal Subjects:: Engineering, Electrical Engineering, Control Engineering, Metrology and Testing

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