1. bookVolume 38 (2020): Issue 1 (March 2020)
Journal Details
License
Format
Journal
eISSN
2083-134X
First Published
16 Apr 2011
Publication timeframe
4 times per year
Languages
English
access type Open Access

Research on the influence of the filtrating electrode on the structure and optical properties of TiO2 thin films prepared by the energy filtering magnetron sputtering technique

Published Online: 08 May 2020
Volume & Issue: Volume 38 (2020) - Issue 1 (March 2020)
Page range: 1 - 7
Received: 21 Nov 2016
Accepted: 23 Apr 2018
Journal Details
License
Format
Journal
eISSN
2083-134X
First Published
16 Apr 2011
Publication timeframe
4 times per year
Languages
English
Abstract

TiO2 thin films were deposited by the energy filtrating magnetron sputtering (EFMS) technique and the traditional direct current magnetron sputtering (DMS) technique. The influence of the filtering electrode mesh number on the structure and optical properties of TiO2 thin films was investigated. The structure, surface morphology and optical properties were characterized by XRD, SEM and ellipsometric spectroscopy, respectively. Results show that the TiO2 thin films deposited by the DMS and EFMS techniques at the same deposition parameters are composed of the anatase phase exclusively. TiO2 thin films deposited at lower deposition rate by the EFMS technique have lower crystallinity, smaller particle size and smoother surface. With increasing the mesh number, the refractive index, extinction coefficient and optical band gap are larger.

Keywords

[1] Fujishima A., Honda K., Nature, 238 (1972), 37.10.1038/238037a0Search in Google Scholar

[2] Lee Y., Ho W., Yeh C., Appl. Surf. Sci., 354 Part A (2015), 20.10.1016/j.apsusc.2015.05.058Search in Google Scholar

[3] Yurddaskal M., Dikici T., Yildirim S., J. Alloy. Compd., 651 (2015), 59.10.1016/j.jallcom.2015.08.064Search in Google Scholar

[4] Ma H., An R., Chen L., Electrochem. Commun., 57 (2015), 18.10.1016/j.elecom.2015.04.015Search in Google Scholar

[5] Du W., Ye Y., Li H., Vacuum, 86 (2012), 1387.10.1016/j.vacuum.2012.01.012Search in Google Scholar

[6] Marin R.P., Ishikawa S., Bahruji H., Appl. Catal. A, 504 (2015), 62.10.1016/j.apcata.2015.02.023Search in Google Scholar

[7] Li X.Y., Xiao J.R., Wang Z.Y., Mater. Sci. Eng. B, 177 (2012), 869.10.1016/j.mseb.2012.03.030Search in Google Scholar

[8] Zhang M., Liu L., Yang X., Surf. Coat. Technol., 229 (2013), 186.Search in Google Scholar

[9] Shang Z.G., Liu Z.Q., Shang P.J., J. Mater. Sci. Technol., 28 (2012), 385.10.1016/S1005-0302(12)60072-3Search in Google Scholar

[10] Wang Z.Y., Yao N., Hu Xing, Mater. Sci. Semicond. Process., 21 (2014), 91.Search in Google Scholar

[11] Zhang X., Li D., Wan J., Mater. Sci. Semicond. Process., 43 (2016), 47.Search in Google Scholar

[12] Yahaya M.Z., Abdullah M.Z, Mohamad A.A., J. Alloy. Compd., 651 (2015), 557.10.1016/j.jallcom.2015.08.110Search in Google Scholar

[13] Scheffel B., Modes T., Metzner C., Surf. Coat. Technol., 287 (2016), 13810.1016/j.surfcoat.2015.12.061Search in Google Scholar

[14] Sirghi L., Hatanaka Y., Sakaguchi K., Appl. Surf. Sci., 352 (2015), 38.10.1016/j.apsusc.2015.04.157Search in Google Scholar

[15] Hotsenpiller P.A.M., Wilson G.A., Roshko A., J. Cryst. Growth, 166 (1996), 779.10.1016/0022-0248(95)00569-2Search in Google Scholar

[16] Albertinetti N., Minden H.T., Appl. Opt., 35 (1996), 5620.10.1364/AO.35.005620Search in Google Scholar

[17] Gibson D., Child D., Song S., Thin Solid Films, 592 (2015), 276.10.1016/j.tsf.2015.04.063Search in Google Scholar

[18] Zhang X., Cooke K., Carmichael P., Surf. Coat. Technol., 236 (2013), 290.10.1016/j.surfcoat.2013.10.002Search in Google Scholar

[19] Zhaoyong W., Ning Y., Changbao H., Appl. Surf. Sci., 288 (2014), 604.10.1016/j.apsusc.2013.10.082Search in Google Scholar

[20] Yong Z., W., Xing H., Ning Y., J. Electron. Mater., 44 (2015), 979.Search in Google Scholar

[21] Wang Z.Y., Yao N., Hu X., Vacuum, 108 (2014), 20.10.1016/j.vacuum.2014.05.009Search in Google Scholar

[22] Hoshi Y., Suzuki E., Shimizu H., Electrochim. Acta, 44 (1999) 3945.10.1016/S0013-4686(99)00103-6Search in Google Scholar

[23] Mattox D.M., J. Vac. Sci. Technol. A, 7 (1989) 1106.10.1116/1.584559Search in Google Scholar

[24] Kim D.J., Hahn S.H., Oh S.H., Mater. Lett., 57 (2) (2002), 355.10.1016/S0167-577X(02)00790-5Search in Google Scholar

[25] Hasan M.M., Haseeb A.S.M.A., Saidur R., Opt. Mater., 32 (2010), 690.10.1016/j.optmat.2009.07.011Search in Google Scholar

[26] Sani S.R., Ali A.M., Jafari R., Physica B, 406 (2011), 3382.Search in Google Scholar

[27] Fox M., Optical Properties of Solids, Oxford University Press, England, 2005.Search in Google Scholar

[28] Deotale A.J., Nandedkar R.V., Mater. Today Pro., 3 (2016), 2069.10.1016/j.matpr.2016.04.110Search in Google Scholar

Recommended articles from Trend MD

Plan your remote conference with Sciendo