Analysis of porous silicon structures using FTIR and Raman spectroscopy
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Jul 22, 2023
About this article
Published Online: Jul 22, 2023
Page range: 218 - 227
Received: Feb 21, 2023
DOI: https://doi.org/10.2478/jee-2023-0028
Keywords
© 2023 Martin Králik et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
This work deals with the production of porous silicon samples by electrochemical etching method and their analysis using FTIR and Raman spectroscopy. Porous silicon samples were prepared under various conditions, such as etching time and current density. A p-type silicon substrate was used to prepare the porous silicon structures. FTIR spectroscopy was performed to determine the chemical bonds formed during the etching process. The structural properties of the prepared samples were investigated by Raman spectroscopy.