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International Journal on Smart Sensing and Intelligent Systems
Volume 3 (2010): Issue 1 (January 2010)
Open Access
Microstructuring of SU-8 Resist for MEMS and Bio-Applications
P.K. Dey
P.K. Dey
,
B. Pramanick
B. Pramanick
,
A. RaviShankar
A. RaviShankar
,
P. Ganguly
P. Ganguly
and
S. Das
S. Das
| Dec 13, 2017
International Journal on Smart Sensing and Intelligent Systems
Volume 3 (2010): Issue 1 (January 2010)
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Published Online:
Dec 13, 2017
Page range:
118 - 129
DOI:
https://doi.org/10.21307/ijssis-2017-384
© 2010 P.K. Dey et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.