<abstract xmlns="http://www.w3.org/1999/xhtml"><p>Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applications such as laser scanning displays, optical switch matrices, and biomedical imaging systems. In this paper, various actuation mechanisms for micromirrors are described. A new geometric configuration of a stacked micromirror that is actuated by electrostatic force is proposed and analyzed to show its superior performance in terms of deflection angle, actuation voltage, and frequency response</p></abstract>

Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applications such as laser scanning displays, optical switch matrices, and biomedical imaging systems. In this paper, various actuation mechanisms for micromirrors are described. A new geometric configuration of a stacked micromirror that is actuated by electrostatic force is proposed and analyzed to show its superior performance in terms of deflection angle, actuation voltage, and frequency response

A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

International Journal on Smart Sensing and Intelligent Systems

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Micromirrors fabricated by MEMS technology have demonstrated to be important sensing or actuating components in many industrial and biomedical applications...

A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

Published Online: Dec 13, 2017

Page range: 480 - 497

DOI: https://doi.org/10.21307/ijssis-2017-303

Keywords
Micromirror, MEMS, Electrostatic Force Actuation, Deflection Angle, Endoscope, OCT (Optical Coherence Tomography), Stacked Micromirror Configuration

© 2008 Sangtak Park et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

A Design Analysis Of Micromirrors In Stacked Configurations With Moving Electrodes

Published Online: Dec 13, 2017

Page range: 480 - 497

DOI: https://doi.org/10.21307/ijssis-2017-303

KeywordsMicromirror, MEMS, Electrostatic Force Actuation, Deflection Angle, Endoscope, OCT (Optical Coherence Tomography), Stacked Micromirror Configuration

© 2008 Sangtak Park et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Keywords
Micromirror, MEMS, Electrostatic Force Actuation, Deflection Angle, Endoscope, OCT (Optical Coherence Tomography), Stacked Micromirror Configuration