<abstract xmlns="http://www.w3.org/1999/xhtml">

<p>A micromechanical silicon resonant accelerometer (MSRA) is a potential micro accelerometer with high accuracy. One of the most important factors affecting its performance is temperature. To research the effect of temperature on micromechanical silicon resonant accelerometer, this study based on the original micromechanical silicon resonant accelerometer, designs a chip-level temperature-sensitive structure which a pair of temperature resonators is arranged on both sides of the force resonator of the original accelerometer to ensure symmetry of the MSRA, as well as compares and selects the appropriate structure, fundamental frequency, and size. The ANSYS simulation is used to verify the rationality of the structure design. The MSRA is fabricated using the Deep Dry Silicon on Glass technique and packaged in metal shell, a measurement circuit is designed and a full temperature test is conducted. The results show that the resonant frequency of the temperature resonator is strongly sensitive to temperature changes but not sensitive to acceleration, and that it can reflects temperature change in the package cavity. Therefore, the temperature resonator can achieve accurate temperature measurement of accelerometer and can be used in temperature compensation.</p>
</abstract>

A micromechanical silicon resonant accelerometer (MSRA) is a potential micro accelerometer with high accuracy. One of the most important factors affecting its performance is temperature. To research the effect of temperature on micromechanical silicon resonant accelerometer, this study based on the original micromechanical silicon resonant accelerometer, designs a chip-level temperature-sensitive structure which a pair of temperature resonators is arranged on both sides of the force resonator of the original accelerometer to ensure symmetry of the MSRA, as well as compares and selects the appropriate structure, fundamental frequency, and size. The ANSYS simulation is used to verify the rationality of the structure design. The MSRA is fabricated using the Deep Dry Silicon on Glass technique and packaged in metal shell, a measurement circuit is designed and a full temperature test is conducted. The results show that the resonant frequency of the temperature resonator is strongly sensitive to temperature changes but not sensitive to acceleration, and that it can reflects temperature change in the package cavity. Therefore, the temperature resonator can achieve accurate temperature measurement of accelerometer and can be used in temperature compensation.

Design of Temperature Sensitive Structure for Micromechanical Silicon Resonant Accelerometer

International Journal of Advanced Network, Monitoring and Controls

This work is licensed under the Creative Commons Attribution 4.0 International License.

A micromechanical silicon resonant accelerometer (MSRA) is a potential micro accelerometer with high accuracy. One of the most important factors affecting its...

Design of Temperature Sensitive Structure for Micromechanical Silicon Resonant Accelerometer

Published Online: Apr 09, 2018

Page range: 56 - 60

DOI: https://doi.org/10.21307/iccnea.2017.91

Keywords
Accelerometer, MEMS, Resonant, Temperature error, Temperature measurement structure

© 2017 Heng Li et al., published by Sciendo

This work is licensed under the Creative Commons Attribution 4.0 International License.

Design of Temperature Sensitive Structure for Micromechanical Silicon Resonant Accelerometer

Published Online: Apr 09, 2018

Page range: 56 - 60

DOI: https://doi.org/10.21307/iccnea.2017.91

KeywordsAccelerometer, MEMS, Resonant, Temperature error, Temperature measurement structure

© 2017 Heng Li et al., published by Sciendo

This work is licensed under the Creative Commons Attribution 4.0 International License.

Keywords
Accelerometer, MEMS, Resonant, Temperature error, Temperature measurement structure