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Journals
Measurement Science Review
Volume 17 (2017): Issue 5 (October 2017)
Open Access
Interferometric Surface Relief Measurements with Subnano/Picometer Height Resolution
Evgeny Sysoev
Evgeny Sysoev
,
Sergey Kosolobov
Sergey Kosolobov
,
Rodion Kulikov
Rodion Kulikov
,
Alexander Latyshev
Alexander Latyshev
,
Sergey Sitnikov
Sergey Sitnikov
and
Ignat Vykhristyuk
Ignat Vykhristyuk
| Oct 23, 2017
Measurement Science Review
Volume 17 (2017): Issue 5 (October 2017)
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Published Online:
Oct 23, 2017
Page range:
213 - 218
Received:
Mar 03, 2017
Accepted:
Sep 18, 2017
DOI:
https://doi.org/10.1515/msr-2017-0025
Keywords
nanorelief
,
monatomic steps
,
low-coherence
,
white light interferometer
,
subnanometer resolution
© 2017 Evgeny Sysoev et al., published by De Gruyter Open
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.