1. bookVolume 36 (2018): Issue 1 (March 2018)
Journal Details
License
Format
Journal
eISSN
2083-134X
First Published
16 Apr 2011
Publication timeframe
4 times per year
Languages
English
Open Access

Thin SixNyCz films deposited from hexamethyldisilazane by RF PECVD technique for optical filter applications

Published Online: 18 May 2018
Volume & Issue: Volume 36 (2018) - Issue 1 (March 2018)
Page range: 56 - 68
Received: 13 Mar 2017
Accepted: 08 Dec 2017
Journal Details
License
Format
Journal
eISSN
2083-134X
First Published
16 Apr 2011
Publication timeframe
4 times per year
Languages
English
Abstract

This work initiates a series of reports aimed at a construction of rugate optical filters based on silicon rich materials of alternating gradients of refractive index n with the help of plasma enhanced chemical vapor deposition (PECVD) technique, The idea is to start deposition of high refractive index SixNy type of material using hexamethyldisilazane (HMDSN) vapor and nitrogen rich atmosphere, and then to gradually replace nitrogen with oxygen in that atmosphere in order to lower n down to a minimum characteristic of SixOy type of material. A return to initial gas composition should increase the index back to its maximum. In the present work, thin SixNyCz films were synthesized from a mixture of HMDSN vapor with gaseous NH3 and N2. The effect of NH3/N2 ratio on the coating morphology, its elemental composition, chemical bonding and optical properties was studied using scanning electron microscopy, X-ray photoelectron spectroscopy, Fourier transform infrared spectroscopy, ultra-violet absorption spectroscopy and variable angle spectroscopic ellipsometry. The results show that films of the highest index of refraction and the lowest extinction coefficient have been deposited from the gas mixture containing 90 % of ammonia. These coatings are also characterized by the lowest carbon and the highest nitrogen contents.

Keywords

[1] ZAKHVALINSKII V.S., PILIUK E.A., GONCHAROV I. YU., SIMASHKEVICH A.V., SHERBAN D.A., BRUC L.I., CURMEI N.N., RUSU M.I., RODRIGEZ G.V., Result. Phys., 6 (2016), 39.10.1016/j.rinp.2016.01.003Search in Google Scholar

[2] FENG L., LIU Z., LI Q., SONG W., Appl. Surf. Sci., 252 (2006), 4064.10.1016/j.apsusc.2005.06.021Search in Google Scholar

[3] ZHANG Q., LI X., SHEN J., WU G., WANG J., CHEN L., Mater. Lett., 45 (2000), 311.10.1016/S0167-577X(00)00124-5Open DOISearch in Google Scholar

[4] CHENG F., M. KELLY S., CLARK S., BRADLEY J.S., BAUMBACH M., SCHÜTZE A., J. Membr. Sci., 280 (2006), 530.10.1016/j.memsci.2006.02.006Search in Google Scholar

[5] SAYGIN HINCZEWSKI D., HINCZEWSKI M., TEPEHAN F.Z., TEPEHAN G.G., Sol. Energ. Mat. Sol. C., 87 (2005), 181.10.1016/j.solmat.2004.07.022Search in Google Scholar

[6] MASSE J.-P., SZYMANOWSKI H., ZABEIDA O., AMASSIAN A., KLEMBERG-SAPIEHA J. E., MARTINU L., Thin Solid Films, 515 (2006), 1674.10.1016/j.tsf.2006.05.047Search in Google Scholar

[7] SZYMANOWSKI H., ZABEIDA O., KLEMBERGSAPIEHA J.E., MARTINU L., J. Vac. Sci. Technol. A, 23 (2005), 241.10.1116/1.1851544Open DOISearch in Google Scholar

[8] LAROUCHE S., SZYMANOWSKI H., KLEMBERGSAPIEHA J.E., MARTINU L., J. Vac. Sci. Technol. A, 22 (2004), 1200.10.1116/1.1763912Search in Google Scholar

[9] KOWALSKI J., SZYMANOWSKI H., SOBCZYKGUZENDA A., GAZICKI-LIPMAN M., B. Pol. Acad. Sci.-Tech., 57 (2009), 171.10.2478/v10175-010-0118-zSearch in Google Scholar

[10] ZHANG K., WANG L.S., YUE G.H., CHEN Y.Z, PENG D.L., QI Z.B., WANG Z.C., Surf. Coat. Tech., 205 (2011), 3588.10.1016/j.surfcoat.2010.12.035Search in Google Scholar

[11] CHEN C.H., YANG M.R., WU S.K., Surf. Coat. Tech., 202 (2008), 2709.10.1016/j.surfcoat.2007.09.052Search in Google Scholar

[12] SCHWARZ F., HAMMER C., THORWARTH G., KUHN M., STRITZKER B., Plasm. Process. Polym., 4 (2007), S254.10.1002/ppap.200730712Search in Google Scholar

[13] VLˇCEK J., KORMUNDA M., ˇC ˘I ŽEK J., SOUKUP Z., PEˇR INA V., ZEMEK J., Diam. Relat. Mater., 12 (2003), 1287.10.1016/S0925-9635(03)00078-5Search in Google Scholar

[14] CHANG H.L., KUO C.T., Mater. Chem. Phys., 72 (2001), 236.10.1016/S0254-0584(01)00444-8Search in Google Scholar

[15] CHOU T.H., FANG Y.K., CHIANG Y.T., LIN C.I., YANG C.Y., Sensor. Actuat. A-Phys., 147 (2008), 60.10.1016/j.sna.2008.03.004Search in Google Scholar

[16] LIMMANEE A., OTSUBO M., SUGIURA T., SATO T., MIYAJIMA S., YAMADA A., KONAGAI M., Thin Solid Films, 516 (2008), 652.10.1016/j.tsf.2007.06.217Search in Google Scholar

[17] KRAUS F., CRUZ S., MÜLLER J., Sensor. Actuat. BChem., 88 (2003), 300.10.1016/S0925-4005(02)00373-8Search in Google Scholar

[18] JIMÉNEZ-PÉREZ J.L., ALGATTI M.A., CRUZ SAN MARTIN V., MOREIRA JÚNIOR P.W.P., MOTA R.R.P., CORREA PACHECO Z.N., CRUZ-OREA A., SÁNCHEZ RAMÍREZ J.F., Mat. Sci. Semicon. Proc., 37 (2015), 223.10.1016/j.mssp.2015.03.035Search in Google Scholar

[19] LU H., CHENG J., J. Am. Chem. Soc., 129 (2007), 14114.10.1021/ja074961q17963385Search in Google Scholar

[20] KOLIPAKA K.L., BRUESER V., SCHLUETER R., QUADE A., SCHAEFER J., WULFF H., STRUNSKUS T., FAUPEL F., Surf. Coat. Tech., 207 (2012), 565.10.1016/j.surfcoat.2012.07.073Search in Google Scholar

[21] MANOUCHEHRI I., GHOLAMI K., ASTINCHAP B., MORDIAN R., MEHRPARVAR D., Optik, 127 (2016), 5383.10.1016/j.ijleo.2016.03.013Search in Google Scholar

[22] KULIKOVSKY V., CTVRTLIK R., VORLICEK V., ZELEZNY V., BOHAC P., JASTRABIK L., Surf. Coat. Tech., 240 (2014), 76.10.1016/j.surfcoat.2013.12.017Search in Google Scholar

[23] HOCHE H., PUSCH C., RIEDEL R., FASEL C., KLEIN A., Surf. Coat. Tech., 205 (2010), S21.10.1016/j.surfcoat.2010.03.039Search in Google Scholar

[24] CHAKRABORTY M., BANERJEE A., DAS D., Physica E, 61 (2014), 95.10.1016/j.physe.2014.03.016Open DOISearch in Google Scholar

[25] JUN K., SHIMOGAKI Y., Sci. Technol. Adv. Mat., 5 (2004), 549.10.1016/j.stam.2004.03.002Open DOISearch in Google Scholar

[26] THEIRICH D., SOLL CH., LEU F., ENGEMANN J., Vacuum, 71 (2003), 349.10.1016/S0042-207X(02)00763-7Search in Google Scholar

[27] TOMAR V.K., GAUTAM D.K., Mat. Sci. Semicon. Proc., 10 (2007), 200.10.1016/j.mssp.2007.11.005Search in Google Scholar

[28] WRÓBEL A.M., KRYSZEWSKI M., GAZICKI M., Polymer, 17 (1976), 673.10.1016/0032-3861(76)90206-8Open DOISearch in Google Scholar

[29] WRÓBEL A.M., KRYSZEWSKI M., GAZICKI M., Polymer, 17 (1976), 678.10.1016/0032-3861(76)90207-XOpen DOISearch in Google Scholar

[30] GRAY R.C., CARVER J.C., HERCULES D.M., J. Electron. Spectrosc., 8 (1976), 343.10.1016/0368-2048(76)80021-7Search in Google Scholar

[31] NAYAR P. S., J. Vac. Sci. Technol. A 20, 2137 (2002), 2137.10.1116/1.1513637Open DOISearch in Google Scholar

[32] H´ALA M., VERNHES R., ZABEIDA O., KLEMBERGSAPIEHA J.E., MARTINU L., J. Appl. Phys., 116 (2014), 213302-1.10.1063/1.4903285Search in Google Scholar

[33] ANDERSON D.R., Analysis Silicones, in: A. LEE SMITH (Ed.), Wiley-Interscience, New York, 1974.Search in Google Scholar

[34] SILVERSTEIN R.M., BASSLER G.C., MORRILL T.C., Spectrometric identification of organic compounds (5th Ed.), Wiley, New York, 1991.Search in Google Scholar

[35] LUCOVSKY G., NEMANIH R.J., KNIGHTS J.C., Phys. Rev. B, 19 (1979), 2064.10.1103/PhysRevB.19.2064Open DOISearch in Google Scholar

[36] TÉNÉGAL F., GHEORGHIU A., DE LA ROCQUE A., DUFOUR G., SÉNÉMAUND C., DOUCEY B., BAHLOUL-HOURLIER D., GOURSAT P., MAYNE M., CAUCHETIER M., J. Electron. Spectrosc., 109 (2000), 241.10.1016/S0368-2048(00)00180-8Search in Google Scholar

[37] TAYLOR J.A., Appl. Surf. Sci., 7 (1981), 168.Search in Google Scholar

[38] CHEN L.C., BHUSARI D.M., YANG C.Y., CHEN K.H., CHUNG T.J., LIN M.C., CHEN C.K., HUANG Y.F., Thin Solid Films, 303 (1997), 66.10.1016/S0040-6090(97)00041-2Search in Google Scholar

[39] SMIRNOVA T.P., BADALIAN A.M., YAKOVKINA L.V., KAICHEV V.V., BUKHTIYAROV V.I., SHMAKOV A.N., ASANOV I.P., RACHLIN V.I., FOMINA A.N., Thin Solid Films, 429 (2003), 144.10.1016/S0040-6090(03)00408-5Search in Google Scholar

[40] GÓMEZ F.J., PRIETO P., ELIZALDE E., PIQUERAS J., Appl. Phys. Lett., 69 (1996), 773.10.1063/1.117887Search in Google Scholar

[41] J ˛ EDRZEJOWSKI P., CI˙ZEK J., AMASSIAN A., KLEMBERG-SAPIEHA J.E., VLCEK J., MARTINU L., Thin Solid Films, 447 - 448 (2004), 201.10.1016/S0040-6090(03)01057-5Search in Google Scholar

[42] FERNÁNDEZ-RAMOS C., SÁNCHEZ-LÓPEZ J.C., BELIN M., DONNET C., PASCARETTI F., FERNÁNDEZ A., Vacuum, 67 (2002), 551.10.1016/S0042-207X(01)00407-9Open DOISearch in Google Scholar

[43] DONG-HAU K., DONG-GI Y., Thin Solid Films, 374 (2000), 92.10.1016/S0040-6090(00)01194-9Search in Google Scholar

[44] BIELI´NSKI D., WRÓBEL A.M., WALKIEWICZPIETRZYKOWSKA A., Tribol. Lett., 13 (2002), 71.Search in Google Scholar

[45] BENDEDDOUCHE A., BERJOAN R., BÊCHE E., HILLEL R., Surf. Coat. Tech., 111 (1999), 184.10.1016/S0257-8972(98)00733-6Search in Google Scholar

[46] CHEN L.C., CHEN K.H., WEI S.L., KICHAMBARE P.D., WU J.J., LU T.R., KUO C.T., Thin Solid Films, 355 - 356 (1999), 112.10.1016/S0040-6090(99)00490-3Search in Google Scholar

[47] THÄRIGEN T., LIPPOLD G., RIEDE V., LORENZ M., KOIVUSAARI K.J., LORENZ D., MOSCH S., GRAU P., HESSE R., STREUBEL P., SZARGAN R., Thin Solid Films, 348 (1999), 103.10.1016/S0040-6090(99)00024-3Search in Google Scholar

[48] BOVARD B.G., Appl. Opt., 32 (1993), 5427.10.1364/AO.32.00542720856352Open DOISearch in Google Scholar

[49] WEBSTER F.X., SILVERSTEIN M.R., KIEMLE J.D., BRYCE D.E, Spectrometric Identification of Organic Compounds, 8th Ed., Wiley, New York, 2015.Search in Google Scholar

Recommended articles from Trend MD

Plan your remote conference with Sciendo