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Materials Science-Poland
Volume 34 (2016): Issue 1 (March 2016)
Open Access
Preliminary comparison of three processes of AlN oxidation: dry, wet and mixed ones
R. Korbutowicz
R. Korbutowicz
and
A. Zakrzewski
A. Zakrzewski
| Apr 27, 2016
Materials Science-Poland
Volume 34 (2016): Issue 1 (March 2016)
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Article Category:
Research Article
Published Online:
Apr 27, 2016
Page range:
157 - 163
Received:
Aug 16, 2016
Accepted:
Nov 16, 2016
DOI:
https://doi.org/10.1515/msp-2016-0010
Keywords
thermal oxidation
,
AlN
,
AlO
,
AlON
,
EDS
,
SE
© 2016 Wroclaw University of Technology
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.
R. Korbutowicz
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11-17, 50-370 Wroclaw,
Poland
A. Zakrzewski
Faculty of Microsystem Electronics and Photonics, Wroclaw University of Technology, Janiszewskiego 11-17, 50-370 Wroclaw,
Poland