1. bookVolume 33 (2015): Issue 2 (June 2015)
Journal Details
License
Format
Journal
eISSN
2083-134X
First Published
16 Apr 2011
Publication timeframe
4 times per year
Languages
English
access type Open Access

Investigations of electrical and optical properties of functional TCO thin films

Published Online: 11 Jul 2015
Volume & Issue: Volume 33 (2015) - Issue 2 (June 2015)
Page range: 363 - 368
Received: 20 Dec 2014
Accepted: 07 Mar 2015
Journal Details
License
Format
Journal
eISSN
2083-134X
First Published
16 Apr 2011
Publication timeframe
4 times per year
Languages
English
Abstract

Transparent conducting oxide (TCO) films of indium-tin-oxide were evaporated on the surface of silicon wafers after phosphorous diffusion and on the reference glass substrates. The influence of deposition process parameters (electron beam current, oxygen flow and the substrate temperature) on optical and electrical properties of evaporated thin films were investigated by means of resistivity measurements and optical spectrophotometry. The performance of prepared thin films was judged by calculated figure of merit and the best result was obtained for the sample deposited on the substrate heated to the 100 °C and then removed from the deposition chamber and annealed in an air for 5 minutes at 400 °C. Refractive index and extinction coefficient were evaluated based on measured transmission spectra and used for designing of antireflection coating for solar cell. The obtained results showed that prepared TCO thin films are promising as a part of counter electrode in crystalline silicon solar cell construction.

Keywords

[1] GINLEY D.S., BRIGHT C., MRS Bull., 25 (2000), 15.10.1557/mrs2000.256Search in Google Scholar

[2] HARTNAGEL H.L., DAWAR A.L., JAIN A.K., JAGADISH C., Semiconducting transparent thin films, Institute of Physics Publishing, Bristol, 1995.Search in Google Scholar

[3] BEYER W., HÜPKES J., STIEBIG H., Thin Solid Films, 516 (2007), 147.10.1016/j.tsf.2007.08.110Search in Google Scholar

[4] JUNG Y.S., LEE D.W., JEON D.Y., Appl. Surf. Sci., 221, (2004) 136.10.1016/S0169-4332(03)00862-6Search in Google Scholar

[5] JAN S.W., LEE S.C., J. Electrochem. Soc., 134 (8) (1987), 2056.10.1149/1.2100819Search in Google Scholar

[6] HOLMELUND E., THESTRUP B., SCHOU J., LARSEN N.B., NIELSEN M.M., JOHNSON E., TOUGAARD S., Appl. Phys. A, 74 (2002), 147.10.1007/s003390100976Search in Google Scholar

[7] WILLEY R.R., Practical Production of Optical Thin Films, Vol. 2, Willey Optical, Consultants, Charleviox, 2008.Search in Google Scholar

[8] THEISS W., SCOUT Software, www.mtheiss.com.Search in Google Scholar

[9] HAACKE G., J. Appl. Phys., 47 (1976), 4086.10.1063/1.323240Search in Google Scholar

Recommended articles from Trend MD

Plan your remote conference with Sciendo