1. bookVolume 33 (2015): Issue 1 (March 2015)
Journal Details
License
Format
Journal
eISSN
2083-134X
First Published
16 Apr 2011
Publication timeframe
4 times per year
Languages
English
Open Access

Antireflective bilayer coatings based on Al2O3 film for UV region

Published Online: 13 Mar 2015
Volume & Issue: Volume 33 (2015) - Issue 1 (March 2015)
Page range: 6 - 10
Received: 13 Jan 2014
Accepted: 14 Oct 2014
Journal Details
License
Format
Journal
eISSN
2083-134X
First Published
16 Apr 2011
Publication timeframe
4 times per year
Languages
English
Abstract

Bilayer antireflective coatings consisting of aluminium oxide Al2O3/MgF2 and Al2O3/SiO2 are presented in this paper. Oxide films were deposited by means of e-gun evaporation in vacuum of 5 × 10-3 Pa in the presence of oxygen, and magnesium fluoride was prepared by thermal evaporation on heated optical lenses made from quartz glass (Corning HPFS). Substrate temperature was maintained at 250 _C during the deposition. Thickness and deposition rate were controlled with a thickness measuring system Inficon XTC/2. The experimental results of the optical measurements carried out during and after the deposition process have been presented. Physical thickness measurements were made during the deposition process and resulted in 44 nm/52 nm for Al2O3/MgF2 and 44 nm/50 nm for Al2O3/SiO2 system. Optimization was carried out for ultraviolet region with minimum of reflectance at 300 nm. The influence of post deposition annealing on the crystal structure was determined by X-ray measurements. In the range from ultraviolet to the beginning of visible region, the reflectance of both systems decreased and reached minimum at 290 nm. The value of reflectance at this point, for the coating Al2O3/MgF2 was equal to R290nm = 0.6 % and for Al2O3/SiO2R290nm = 1.1 %. Despite the difference between these values both are sufficient for applications in the UV optical systems for medicine and UV laser technology.

Keywords

[1] STAPI´N SKI T., MARSZAŁEK K., LIPI´NSKI M., PANEK P., SZCZEPANIK W., Investigations of solar panel with anhanced transmission glass, in: Suszynski Z. (Ed.), Microelectronic materials and technologies, WUPK, Koszalin, 2012, p. 285.Search in Google Scholar

[2] LEE H.M., SAHOO K.C., LI Y.W., WU J.C, CHANG E.Y., Thin Solid Films, 518 (2010), 7204.10.1016/j.tsf.2010.04.078Search in Google Scholar

[3] CITEK K., Optometry, 79 (2008), 143.10.1016/j.optm.2007.08.019Search in Google Scholar

[4] YOLDAS B.E., PARTLOW D.P., Appl. Optics, 23 (1984), 1418.10.1364/AO.23.001418Search in Google Scholar

[5] BAEUMER S., Handbook of plastic optics,Willey-VCH, Berlin, 2005, p. 139.10.1002/3527605126Search in Google Scholar

[6] KAISER N., UHLIG H., SCHALLENBERG U., ANTON B., KAISER U., MANN K., EVA E., Thin Solid Films, 260 (1995), 86.10.1016/0040-6090(94)06469-5Search in Google Scholar

[7] SELHOFER H., MUELLER R., Thin Solid Films, 351 (1999), 180.10.1016/S0040-6090(99)00305-3Search in Google Scholar

[8] LOSURDO M., GIANGREGORIO M.M., CAPEZZUTO P., BRUNO G., TORO R.G., MALANDRINO G., FRAGAL` A I.L., ARMELAO L., BARRECA D., TONDELLO E., SUVOROVA A.A., YANG D., IRENE E.A., Adv.Search in Google Scholar

Funct. Mater., 17 (17) (2007), 3607.Search in Google Scholar

[9] WINKOWSKI P., MARSZAŁEK K.W., Proc. SPIE., 8902 (2014), 890228-1 890228-5.Search in Google Scholar

[10] KOC K., TEPEHAN F.Z., TEPEHAN G.G., J. Mater.Sci., 40 (6) (2005), 1363.10.1007/s10853-005-0566-2Search in Google Scholar

[11] IZAWA T., Proc. SPIE, 1441 (1990), 339.Search in Google Scholar

[12] RAINER F., LOWDERMILK W.H., MILAM D., CARNIGLIA C.K., HART T.T., LICHTENSTEIN T.L., Appl. Optics, 24 (1985), 496.10.1364/AO.24.00049618216976Search in Google Scholar

[13] SMITH D., BAUMEISTER P., Appl. Optics, 18 (1979), 111.10.1364/AO.18.00011120208670Search in Google Scholar

[14] KUMAR P., WIEDMANN M.K., WINTER C.H., AVRUTSKY I., Appl. Optics, 48 (28) (2009), 5407.10.1364/AO.48.00540719798382Search in Google Scholar

[15] CRAWFORD L.J., EDMONDS N.R., Thin Solid Films, 515 (2006), 907.10.1016/j.tsf.2006.07.058Search in Google Scholar

[16] LIOU Y.Y., Jpn. J. Appl. Phys., 43 (2004), 4185.10.1143/JJAP.43.4185Search in Google Scholar

[17] WANG H.L., LIN C.H., HON M.H., Thin Solid Films, 310 (1997), 260.10.1016/S0040-6090(97)00404-5Search in Google Scholar

[18] GREY D.E., (ED.), American Institute of Physics Handbook, Mc Graw-Hill, New York, 1982.Search in Google Scholar

[19] WEAST R.C., CRC Handbook of Chemistry and Physics, CRC Press, Inc., USA, 1983, p. 84.Search in Google Scholar

[20] THIELSCH R., GATTO A., HEBER J., KAISER N., Thin Solid Films, 410 (2002), 86.10.1016/S0040-6090(02)00208-0Search in Google Scholar

[21] SCHNEIDER J.M., ANDERS A., HJ¨ORVARSSON B., PETROV I., MACAK K., HELMERSSON U., SUNDGREN J.E., Appl. Phys. Lett., 74 (1999), 200.10.1063/1.123292Search in Google Scholar

[22] CARMONA-TELLEZ S., GUZMAN-MENDOZA J., AGUILAR-FRUTIS M., ALARCON-FLORES G., GARCIA-HIPOLITO M., CANSECO M.A., FALCONY C., J. Appl. Phys., 103 (3) (2008), 034105.10.1063/1.2838467Search in Google Scholar

[23] MARSZAŁEK K., WINKOWSKI P., JAGLARZ J., Mater.Search in Google Scholar

Sci.-Poland, 32 (1) (2014), 80. 10.2478/s13536-013-0156-ySearch in Google Scholar

Recommended articles from Trend MD

Plan your remote conference with Sciendo