Computer simulation of sputtering of graphite target in magnetron sputtering device with two zones of erosion

Published Online: Mar 13, 2015

Page range: 82 - 94

Received: May 21, 2014

Accepted: Sep 20, 2014

DOI: https://doi.org/10.1515/msp-2015-0001

Keywords

Monte Carlo computer simulation, magnetron sputtering, flux of particles, carbon, graphite target, energy of particles

© 2015

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.