Electrostatic field in terms of geometric curvature in membrane MEMS devices
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Jul 20, 2017
About this article
Published Online: Jul 20, 2017
Page range: 165 - 184
Received: May 07, 2017
Accepted: Jun 16, 2017
DOI: https://doi.org/10.1515/caim-2017-0009
Keywords
© 2017
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.
In this paper we present, in a framework of 1D-membrane Micro-Electro-Mechanical- Systems (MEMS) theory, a formalization of the problem of existence and uniqueness of a solution related to the membrane deformation u for electrostatic actuation in the steady- state case. In particular, we propose a new model in which the electric field magnitude E is proportional to the curvature of the membrane and, for it, we obtain results of existence by Schauder-Tychono's fixed point application and subsequently we establish conditions of uniqueness. Finally, some numerical tests have been carried out to further support the analytical results.