Compensation of Capacitive Differential Pressure Sensor using Multi Layer Perceptron Neural Network

1Q. Hayat, F. Li-Yun, X.-Zh. Ma and T. Bingqi, “Comparative Study of Pressure Wave Mathematical Models for HP Fuel Pipeline of CEUP at Various Operating Conditions”, International Journal of Smart Sensing and Intelligent Systems. Vol. 6, No. 3, pp. 1077-1101, June 2013. Search in Google Scholar

2Y. Tao, Zh. Chong, W. Huanming, W. Qisong, Y. Haigang, “A 97 dB dynamic range CSA-based readout circuit with analog temperature compensation for MEMS capacitive sensors”, Journal of Semiconductors, Vol. 34, No. 11, pp. (115005)1-8, November 2013.10.1088/1674-4926/34/11/115005 Search in Google Scholar

3X. Li, G. Meijer, “An accurate interface for capacitive sensor”, IEEE Transaction on Instrumentation and Measurement, Vol. 51, No. 5, pp. 935-939, October 2002.10.1109/TIM.2002.807793 Search in Google Scholar

4J.C. Patra, A.C. Kot, G. Panda, “An Intelligent Pressure Sensor using Neural Networks”, IEEE Transaction on Instrumentation and Measurement, Vol. 49, No. 4, pp. 829-834, 2000.10.1109/19.863933 Search in Google Scholar

5C. Pramanic, T. Islam, H. Saha, “Temperature Compensation of Piezoresistive Micromachined Porous Silicon Pressure Sensor by ANN”, Microelectronics and Reliability, Vol. 46, No. 2-4, pp. 343-352, February-April 2006.10.1016/j.microrel.2005.04.008 Search in Google Scholar

6Z. Dibi, M.L. Hafiane, “Artificial neural network based hysteresis estimation of capacitive pressure sensor”, Physical Status Solid (b), Vol. 244, No. 1, pp. 468-473, 2007.10.1002/pssb.200672579 Search in Google Scholar

7M. Hashemi, J. Ghaisari, Y. Zakeri, “Modeling and Compensation for Capacitive Pressure Sensor by RBF Neural Networks”, 8th IEEE International Conference on Control and Automation, Xiamen, China, June 9-11, pp. 1109-1114, 2010. Search in Google Scholar

8N. Futane, S.R. Chowdhury, C.R. Chowdhury, H. Saha, “ANN based CMOS ASIC Design for Improved Temperature-drift Compensation of Piezoresistive Micro-machinedHigh Resolution Pressure Sensor”, Microelectronics and Reliability, Vol. 50, No. 2, pp. 282291, 2010. Search in Google Scholar

9N.P. Futane, S. RoyChowdhury, C. RoyChaudhuri, H. Saha, “Analog ASIC for Improved Temperature Drift Compensation of a High Sensitive Porous Silicon Pressure Sensor”, Analog Integrated Circuits and Signal Processing, Vol. 68, No. 3, pp. 383-393, 2011.10.1007/s10470-010-9580-7 Search in Google Scholar

10M. Hashemi, J. Ghaisari, A. Salighehdar, “Identification and Compensation of a Capacitive Differential Pressure Sensor Based on Support Vector Regression Using Particle Swarm Optimization”, Intelligent Automation& Soft Computing, Vol. 18, No. 3, pp. 263277, 2012. Search in Google Scholar

11G. Zhou, Y. Zhao, F. Guo, W. Xu, “A Smart High Accuracy Silicon Piezoresistive Pressure Sensor Temperature Compensation System”, Sensors, Vol. 14, No. 7, pp. 1217412190, 2014. Search in Google Scholar

12J. Qi , J. Cai, “Error Modelling and Compensation of 3D Scanning Robot System based on PSO-RBFNN”, International Journal of Smart Sensing and Intelligent Systems, Vol. 7, No. 2, pp. 837-855, June 2014.10.21307/ijssis-2017-684 Search in Google Scholar

13P. Moallem, A. Monadjemi, “An Efficient MLP Learning Algorithm using Parallel Tangent Gradient and Improved Adaptive Learning Rates”, Connection Science, Vol. 22, No. 4, pp. 373-392, December 2010.10.1080/09540091.2010.523455 Search in Google Scholar

14S.C.Mukhopadhyay, “Quality inspection of electroplated materials using planar type micro-magnetic sensors with post processing from neural network model”, IEE Proceedings – Science, Measurement and Technology, Vol. 149, No. 4, pp. 165-171, July 2002.10.1049/ip-smt:20020340 Search in Google Scholar

15S.C.Mukhopadhyay, S.Yamada and M.Iwahara, “Evaluation of near-surface material properties using planar type mesh coils with post-processing from neural network model”, International journal Studies in Applied Electromagnetics and Mechanics, IOS Press Vol. 23, pp. 181-189, 2002. Search in Google Scholar

16APT3100 Smart Pressure Transmitter Operation Manual, http:// www.autroltransmitters.com Search in Google Scholar

17S. Samarasinghe, Neural Networks for Applied Sciences and Engineering: From Fundamentals to Complex Pattern Recognition, Auerbach Publications, New York, 2006.Search in Google Scholar