Layer type/position of specimen | 1 | 2 | 3 | 4 | 5 | |
---|---|---|---|---|---|---|
Ti | Thickness, nm | 131 | 152 | 150 | 149 | 141 |
Resistance, Ohm | 13.48 | 11.55 | 13.01 | 11.53 | 11.41 | |
T1O₂ on glass | Thickness, nm | 18.50 | 19.10 | 18.10 | 18.30 | 18.60 |
26.70 | 28.10 | 26.50 | 26.40 | 26.90 | ||
51.30 | 56.40 | 54.00 | 53.50 | 53.20 | ||
TiO₂ on Ti/glass | Thickness, nm | 16.40 | 17.00 | 16.30 | 16.10 | 15.60 |
24.80 | 26.00 | 24.70 | 24.60 | 23.90 | ||
49.30 | 51.80 | 51.00 | 49.80 | 48.30 |