Influence of thermal treatment on the formation of ohmic contacts based on Ti/Al/Ni/Au metallization to n-type AlGaN/GaN heterostructures

Publié en ligne: 14 déc. 2012

Pages: 342 - 347

DOI: https://doi.org/10.2478/s13536-012-0051-y

Mots clés

ohmic contact, AlGaN/GaN heterostructure, 2-dimensional electron gas (2DEG)

© 2012 Wroclaw University of Technology

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