<abstract xmlns="http://www.w3.org/1999/xhtml">

<p>The mass filtering equipment in the ion beam processing industry plays a vital role. Mass filtering is usually achieved through classic magnetic mass selector techniques. The drawbacks of these techniques are the dimensions, weight, price, and power consumption. We suggest mitigating it by using the electrostatic RF mass selector instead of the magnetic one. We discuss the development of a novel ion beam processing apparatus that employs a QMS filter in a vacuum of superior purity. We describe the experimental setup in terms of part design. The article presents the successful test results of that parts. The article also explains in detail the basic principles and the technical realization of the whole apparatus and presents experimental data showing its high capabilities.</p>
</abstract>

The mass filtering equipment in the ion beam processing industry plays a vital role. Mass filtering is usually achieved through classic magnetic mass selector techniques. The drawbacks of these techniques are the dimensions, weight, price, and power consumption. We suggest mitigating it by using the electrostatic RF mass selector instead of the magnetic one. We discuss the development of a novel ion beam processing apparatus that employs a QMS filter in a vacuum of superior purity. We describe the experimental setup in terms of part design. The article presents the successful test results of that parts. The article also explains in detail the basic principles and the technical realization of the whole apparatus and presents experimental data showing its high capabilities.

High Resolution Quadrupole Mass Spectrometer for Ion Beam Processing

Latvian Journal of Physics and Technical Sciences

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

{"article-title":"High Resolution Quadrupole Mass Spectrometer for Ion Beam Processing"}

The mass filtering equipment in the ion beam processing industry plays a vital role. Mass filtering is usually achieved through classic magnetic mass selector...

High Resolution Quadrupole Mass Spectrometer for Ion Beam Processing

Publié en ligne: 10 févr. 2024

Pages: 5 - 13

DOI: https://doi.org/10.2478/lpts-2024-0001

Mots clés
Boron ion beam, implantation, quadrupole mass selection

© 2024 J. Blahins et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

High Resolution Quadrupole Mass Spectrometer for Ion Beam Processing

Publié en ligne: 10 févr. 2024

Pages: 5 - 13

DOI: https://doi.org/10.2478/lpts-2024-0001

Mots clésBoron ion beam, implantation, quadrupole mass selection

© 2024 J. Blahins et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Mots clés
Boron ion beam, implantation, quadrupole mass selection