Superconducting properties of very high quality NbN thin films grown by pulsed laser deposition

[1] D. Dochev et al, “Growth and characterization of epitaxial ultra-thin NbN films on 3C-SiC/Si substrate for teraherz applications”, Supercond. Sci. Technol., vol. 24, pp. 035016, 2011.10.1088/0953-2048/24/3/035016Search in Google Scholar

[2] E. A. Antonova, D. R. Dzhurgaev, G. P. Motulevich and V. A. Sukhov, “Superconducting energy gap of niobium nitride”, Zh. Exsp. Theor. Fiz., vol. 80, pp. 2426–2429, 1981.Search in Google Scholar

[3] E. I. Alessandrini, V. Sadagopan, R. B. Laibowitz, “Relationship between Structure and Sputtering Parameters in NbN Films”, J. Vac. Sci. & Technol., vol. 8, pp. 188, 1971.10.1116/1.1316283Search in Google Scholar

[4] J. J. Olaya, L. Huerta, S. E. Rodil, R. Escamilla, “Superconducting niobium nitride films deposited by unbalanced magnetron sputtering”, Thin Solid Films, vol. 516, pp. 8768–8773, 2008.10.1016/j.tsf.2008.06.065Search in Google Scholar

[5] D. Hazra et al, “Superconducting properties of very high quality NbN thin films grown by high temperature chemical vapor deposition”, Supercond. Sci. Technol., vol. 29, pp. 105011, 2016.10.1088/0953-2048/29/10/105011Search in Google Scholar

[6] S. Linzen et al, “Structural and electrical properties of ultrathin niobium nitride films grown by atomic layer deposition”, Sci. Technol., vol. 30, pp. 035010, 2017.10.1088/1361-6668/aa572aSearch in Google Scholar

[7] A. Bhat, X. Meng, A. Wong, T. V. Duzer, “Superconducting NbN films grown using pulsed laser deposition for potential application in internally shunted Josephson junctions”, Supercond. Sci. Technol., vol. 12, pp. 1030–1032, 1999.10.1088/0953-2048/12/11/401Search in Google Scholar

[8] R. E. Treece et al, “Pulsed laser deposition of high-quality NbN thin films”, Appl. Phys. Lett., vol. 65, pp. 2860, 1994.10.1063/1.112516Search in Google Scholar

[9] A. B. Kaul, T. D. Sands, T. V. Duzer, “High-Tc superconducting NbN films with low particulate density grown at 25 °C using pulsed laser deposition”, J. Mater. Res., vol. 16, pp. 1223–1226, 2001.10.1557/JMR.2001.0168Search in Google Scholar

[10] Th. Kehagias, Ph. Komninou, G. Nouet, P. Ruterana, and Th. Karakostas, “Misfit relaxation of the AlN/Al₂O₃ (0001) interface”, Phys. Rev. B, vol. 64, pp. 195329, 2001.Search in Google Scholar

[11] F. Merciere et al, “Niobium nitride thin films deposited by high temperature chemical vapor deposition”, Surface and Coatings Technology, vol. 260, pp. 125–132, 2014.10.1016/j.surfcoat.2014.08.084Search in Google Scholar

[12] J. Narayan, B. C. Larson, “Domain epitaxy: A unified paradigm for thin film growth”, J. Appl. Phys., vol. 93, pp. 278, 2003.10.1063/1.1528301Search in Google Scholar

[13] Z. Wang, A. Kawakami, Y. Uzawa, B. Komiyama, “Superconducting properties and crystal structures of singlecrystal niobium nitride thin films deposited at ambient substrate temperature”, J. Appl. Phys., vol. 79, pp. 7837–7842, 1996.10.1063/1.362392Search in Google Scholar

[14] J. M. Rowell, S. Y. Xu, X. H. Zeng, A. V. Pogrebnyakov, Q. Li, X. X. Xi, J. M. Redwing, W. Tian, X. Pan, “Critical current density and resistivity of MgB₂ films”, Appl. Phys. Lett., vol. 83, pp. 102–104, 2003.10.1063/1.1590734Search in Google Scholar

[15] J. R. Clem et al, “Ambegaokar-Baratoff-Ginzburg-Landau crossover effects on the critical current density of granular superconductors”, Phys. Rev. B, vol. 35, pp. 6637, 1987.10.1103/PhysRevB.35.66379940910Search in Google Scholar

[16] K. Senapati, N. K. Pandey, R. Nagar, R. C. Budhani, “Normal-state transport and vortex dynamics in thin films of two structural polymorphs of superconducting NbN”, Phys. Rev. B, vol. 74, pp. 104514, 2006.10.1103/PhysRevB.74.104514Search in Google Scholar

[17] B. Abeles, “Effect of charging energy on superconductivity in granular metal films”, Phys. Rev. B, vol. 15, pp. 2828, 1977.10.1103/PhysRevB.15.2828Search in Google Scholar

[18] S. Thakoor, J. L. Lamb, A. P. Thakoor, S. K. Khanna, “High T_c superconducting NbN films deposited at room temperature”, J. Appl. Phys., vol. 58, pp. 4643, 1985.10.1063/1.336235Search in Google Scholar

[19] T. Shino et al, “Improvement of the critical temperature of superconducting NbTiN and NbN thin films using the AlN buffer layer”, Sci. Technol., vol. 23, pp. 045004, 2010.10.1088/0953-2048/23/4/045004Search in Google Scholar