The Effect of the Electrode Position on the Dynamic Behavior of an Electrostatically Actuated Microcantilever
Publié en ligne: 31 déc. 2019
Pages: 34 - 41
Reçu: 08 août 2017
© 2019 Mohamed Ahmed Eshag et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.