<abstract xmlns="http://www.w3.org/1999/xhtml">

<p>In this paper, the authors introduced a new approach to realize a contact-free micro-bearing for MEMS (Micro-Electro-Mechanical-Systems) applications. In the proposed idea, the mechanism of magnetic repulsion by eddy current was employed. Numerical analysis and experimental research was performed. In the proposed structure having a ringed magnetic circuit having a circularly-arranged gap (gapped-core), the generated magnetic flux was concentrated with high density and showed precipitously gradient in the magnetic field and also showed a larger of repulsive force comparing to the general electromagnetic (iron-core). Advantage of the proposed method and its viability as a contact-free Micro-bearing was discussed.</p>
</abstract>

In this paper, the authors introduced a new approach to realize a contact-free micro-bearing for MEMS (Micro-Electro-Mechanical-Systems) applications. In the proposed idea, the mechanism of magnetic repulsion by eddy current was employed. Numerical analysis and experimental research was performed. In the proposed structure having a ringed magnetic circuit having a circularly-arranged gap (gapped-core), the generated magnetic flux was concentrated with high density and showed precipitously gradient in the magnetic field and also showed a larger of repulsive force comparing to the general electromagnetic (iron-core). Advantage of the proposed method and its viability as a contact-free Micro-bearing was discussed.

Fundamental Study of Magnetically Levitated Contact-Free Micro-Bearing for Mems Applications

International Journal on Smart Sensing and Intelligent Systems

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

In this paper, the authors introduced a new approach to realize a contact-free micro-bearing for MEMS (Micro-Electro-Mechanical-Systems) applications. In the...

Fundamental Study of Magnetically Levitated Contact-Free Micro-Bearing for Mems Applications

Publié en ligne: 13 déc. 2017

Pages: 536 - 549

DOI: https://doi.org/10.21307/ijssis-2017-407

Mots clés
Micro-bearing, magnetic levitation, eddy-current, contact-free, MEMS

© 2010 T. Nakao et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Fundamental Study of Magnetically Levitated Contact-Free Micro-Bearing for Mems Applications

Publié en ligne: 13 déc. 2017

Pages: 536 - 549

DOI: https://doi.org/10.21307/ijssis-2017-407

Mots clésMicro-bearing, magnetic levitation, eddy-current, contact-free, MEMS

© 2010 T. Nakao et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Mots clés
Micro-bearing, magnetic levitation, eddy-current, contact-free, MEMS