Analytical Modeling for the Grating Eddy Current Displacement Sensors

As a new type of displacement sensor, grating eddy current displacement sensor (GECDS) combines traditional eddy current sensors and grating structure in one. The GECDS performs a wide range displacement measurement without precision reduction. This paper proposes an analytical modeling approach for the GECDS. The solution model is established in the Cartesian coordinate system, and the solving domain is limited to finite extents by using the truncated region eigenfunction expansion method. Based on the second order vector potential, expressions for the electromagnetic field as well as coil impedance related to the displacement can be expressed in closed-form. Theoretical results are then confirmed by experiments, which prove the suitability and effectiveness of the analytical modeling approach.