<abstract xmlns="http://www.w3.org/1999/xhtml"><p>A great advantage of Low Temperature Co-fired Ceramics (LTCC) yields the possibility of channel and air cavity fabrication. Such empty spaces have numerous applications, for example, in microfluidics, microwave techniques and integrated packaging. However, improper geometry of these structures can degrade the performance of the final device. The processing parameters recommended by the LTCC tape supplier are relevant for the production of multilayer circuits but not surface embedded channels and/or cavities. Thus, it is important to examine which factors of the fabrication process are the most significant. In our study, special attention has been paid to the geometric performance of the channel structure resulting from the applied processing parameters. Laser cutting parameters were checked to obtain the structures with great fidelity. The impact of an isostatic lamination on the quality of the final structure was analyzed. The influence of pressure and temperature of the lamination process on the channel geometry and tape shrinkage were examined. The performed experiments showed that some improvements in channel/cavity geometry may be achieved by optimizing the processing procedures. The microscopic observations combined with the Analysis of Variance (ANOVA) showed which combinations of the processing parameters are the best for achieving a channel/cavity structure with the desired geometry.</p></abstract>

A great advantage of Low Temperature Co-fired Ceramics (LTCC) yields the possibility of channel and air cavity fabrication. Such empty spaces have numerous applications, for example, in microfluidics, microwave techniques and integrated packaging. However, improper geometry of these structures can degrade the performance of the final device. The processing parameters recommended by the LTCC tape supplier are relevant for the production of multilayer circuits but not surface embedded channels and/or cavities. Thus, it is important to examine which factors of the fabrication process are the most significant. In our study, special attention has been paid to the geometric performance of the channel structure resulting from the applied processing parameters. Laser cutting parameters were checked to obtain the structures with great fidelity. The impact of an isostatic lamination on the quality of the final structure was analyzed. The influence of pressure and temperature of the lamination process on the channel geometry and tape shrinkage were examined. The performed experiments showed that some improvements in channel/cavity geometry may be achieved by optimizing the processing procedures. The microscopic observations combined with the Analysis of Variance (ANOVA) showed which combinations of the processing parameters are the best for achieving a channel/cavity structure with the desired geometry.

Impact of processing parameters on the LTCC channels geometry

Faculty of Microsystem Electronics and Photonics

Materials Science-Poland

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

{"article-title":"Impact of processing parameters on the LTCC channels geometry"}

A great advantage of Low Temperature Co-fired Ceramics (LTCC) yields the possibility of channel and air cavity fabrication. Such empty spaces have numerous...

Impact of processing parameters on the LTCC channels geometry

Publié en ligne: 06 janv. 2016

Pages: 816 - 825

Reçu: 11 févr. 2015

Accepté: 02 sept. 2015

DOI: https://doi.org/10.1515/msp-2015-0104

Mots clés
LTCC, channel fabrication, laser machining, lamination, DoE

© 2015 Jan Macioszczyk et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Impact of processing parameters on the LTCC channels geometry

Publié en ligne: 06 janv. 2016

Pages: 816 - 825

Reçu: 11 févr. 2015

Accepté: 02 sept. 2015

DOI: https://doi.org/10.1515/msp-2015-0104

Mots clésLTCC, channel fabrication, laser machining, lamination, DoE

© 2015 Jan Macioszczyk et al., published by De Gruyter Open

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Mots clés
LTCC, channel fabrication, laser machining, lamination, DoE