Mechanical and structural properties of titanium dioxide deposited by innovative magnetron sputtering process

Publié en ligne: 30 août 2016

Pages: 660 - 668

Reçu: 09 mars 2015

Accepté: 20 mai 2015

DOI: https://doi.org/10.1515/msp-2015-0084

Mots clés

plasma modulated magnetron sputtering, titanium dioxide, hardness, scratch resistance, optical and structural properties

© 2016

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.