<abstract xmlns="http://www.w3.org/1999/xhtml"><p> Evolution of residual stress and its components with increasing temperature in chemical vapor deposited (CVD) diamond films has a crucial impact on their high temperature applications. In this work we investigated temperature dependence of stress in CVD diamond film deposited on Si(100) substrate in the temperature range of 30 °C to 480 °C by Raman mapping measurement. Raman shift of the characteristic diamond band peaked at 1332 cm<sup>-1</sup> was studied to evaluate the residual stress distribution at the diamond surface. A new approach was applied to calculate thermal stress evolution with increasing tempera­ture by using two commonly known equations. Comparison of the residts obtained from the two methods was presented. The intrinsic stress component was calculated from the difference between average values of residual and thermal stress and then its temperature dependence was discussed. </p></abstract>

Evolution of residual stress and its components with increasing temperature in chemical vapor deposited (CVD) diamond films has a crucial impact on their high temperature applications. In this work we investigated temperature dependence of stress in CVD diamond film deposited on Si(100) substrate in the temperature range of 30 °C to 480 °C by Raman mapping measurement. Raman shift of the characteristic diamond band peaked at 1332 cm-1 was studied to evaluate the residual stress distribution at the diamond surface. A new approach was applied to calculate thermal stress evolution with increasing tempera­ture by using two commonly known equations. Comparison of the residts obtained from the two methods was presented. The intrinsic stress component was calculated from the difference between average values of residual and thermal stress and then its temperature dependence was discussed.

Temperature dependence of stress in CVD diamond films studied by Raman spectroscopy

Faculty of Technical Physics, Poznan University of Technology, Piotrowo 3, 60-965 Poznan, Poland

Institute of Physics, Kazimierz Wielki University, Powstańców Wielkopolskich 2, 85-090 Bydgoszcz, Poland

Medical Physics Department, Oncology Center, I. Romanowskiej 2, 85-796 Bydgoszcz, Poland

Materials Science-Poland

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Evolution of residual stress and its components with increasing temperature in chemical vapor deposited (CVD) diamond films has a crucial impact on their high...

Temperature dependence of stress in CVD diamond films studied by Raman spectroscopy

Publié en ligne: 30 août 2016

Pages: 620 - 626

Reçu: 12 janv. 2015

Accepté: 28 mars 2015

DOI: https://doi.org/10.1515/msp-2015-0064

Mots clés
Raman spectroscopy, stress, diamond structure, CVD diamond films

© 2016

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Temperature dependence of stress in CVD diamond films studied by Raman spectroscopy

Publié en ligne: 30 août 2016

Pages: 620 - 626

Reçu: 12 janv. 2015

Accepté: 28 mars 2015

DOI: https://doi.org/10.1515/msp-2015-0064

Mots clésRaman spectroscopy, stress, diamond structure, CVD diamond films

© 2016

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.

Mots clés
Raman spectroscopy, stress, diamond structure, CVD diamond films