Multilevel Distributed Embedded System for Control of the DC Magnetron Sputtering Process
Publié en ligne: 19 janv. 2018
Pages: 43 - 55
Reçu: 15 sept. 2017
© 2017 Albert-Zsombor Fekete et al., published by De Gruyter Open
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 3.0 License.