Surface Modification of SB-SE Thin Films by Laser Irradiation and Etching

The surfaces of Sb₂₀Se₈₀ and Sb₄₀Se₆₀ thin films were modified by exposure to laser light. To study the topology of these surfaces the scanning force microscopy was used. As a result, the surface of as-deposited/amorphous Sb_xSe_100-x films appear to be flat, while the treated films exhibit three types of surface structure on the sub-micrometer scale. Changes in the surface characteristics as well as potential applications of selective etching of Sb-Se thin films are discussed.