<abstract xmlns="http://www.w3.org/1999/xhtml">

<p>In this article, we successfully developed and simulated a wearable pressure sensor for monitoring blood pressure. This sensor utilizes MEMS technology and is based on LC wireless, eliminating the need for a battery system. The sensor is constructed with a metal-insulator-metal capacitive design, featuring a diaphragm measuring 1.1 mm × 1.1 mm and with a thickness of 22 µm. Furthermore, we devised a unique C-shaped circular slot diaphragm to enhance sensitivity by reducing the mechanical rigidity of the membrane. Our design and simulation were conducted using COMSOL Multiphysics. From our findings, we observed that the frequency response to varying pressure ranged from 285 to 445 MHz. Additionally, our results yielded a mechanical sensitivity of 125.7 nm/mmHg, along with a sensor sensitivity of 1.49 fF/mmHg. Notably, the sensor with the novel C-shaped circular slot diaphragm exhibited high-pressure sensitivity, surpassing that of a clamped diaphragm by 15.5%.</p>
</abstract>

In this article, we successfully developed and simulated a wearable pressure sensor for monitoring blood pressure. This sensor utilizes MEMS technology and is based on LC wireless, eliminating the need for a battery system. The sensor is constructed with a metal-insulator-metal capacitive design, featuring a diaphragm measuring 1.1 mm × 1.1 mm and with a thickness of 22 µm. Furthermore, we devised a unique C-shaped circular slot diaphragm to enhance sensitivity by reducing the mechanical rigidity of the membrane. Our design and simulation were conducted using COMSOL Multiphysics. From our findings, we observed that the frequency response to varying pressure ranged from 285 to 445 MHz. Additionally, our results yielded a mechanical sensitivity of 125.7 nm/mmHg, along with a sensor sensitivity of 1.49 fF/mmHg. Notably, the sensor with the novel C-shaped circular slot diaphragm exhibited high-pressure sensitivity, surpassing that of a clamped diaphragm by 15.5%.

Enhancing Blood Pressure Sensitivity: Innovative C-Shaped Slot Design in Microsensor Systems

Laboratory of Electronic, Photonic and Optronic (LEPO)

University Djillali Liabes of Sidi Bel Abbes

The Scientific Bulletin of Electrical Engineering Faculty

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

In this article, we successfully developed and simulated a wearable pressure sensor for monitoring blood pressure. This sensor utilizes MEMS technology and is...

Enhancing Blood Pressure Sensitivity: Innovative C-Shaped Slot Design in Microsensor Systems

Publicado en línea: 20 jun 2024

Páginas: 64 - 70

DOI: https://doi.org/10.2478/sbeef-2024-0012

Palabras clave
Biomedical monitoring, blood pressure, microsensors, pressure measurement, capacitive sensors, polyimides, sensitivity

© 2024 Tahar Lahreche et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Enhancing Blood Pressure Sensitivity: Innovative C-Shaped Slot Design in Microsensor Systems

Publicado en línea: 20 jun 2024

Páginas: 64 - 70

DOI: https://doi.org/10.2478/sbeef-2024-0012

Palabras claveBiomedical monitoring, blood pressure, microsensors, pressure measurement, capacitive sensors, polyimides, sensitivity

© 2024 Tahar Lahreche et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Palabras clave
Biomedical monitoring, blood pressure, microsensors, pressure measurement, capacitive sensors, polyimides, sensitivity