Technological challenges in manufacturing of vacuum gauge thermionic cathode using thick-film technology

Publicado en línea: 22 may 2024

Páginas: 126 - 139

Recibido: 05 feb 2024

Aceptado: 11 abr 2024

DOI: https://doi.org/10.2478/msp-2024-0007

Palabras clave

alundum, wet etching, vacuum gauge, SVM, thick-film

© 2024 Laura Jasińska et al., published by Sciendo

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