Microcontroller based Power Efficient Signal Conditioning Unit for Detection of a Single Gas using MEMS based Sensor

[1]Hagleitner. C, Lange D, Kerness N, Kummer A, Song W H, Hierlemann A, Brand O, Baltes H, CMOS single chip multisensor gas detection system,Proc. IEEE MEMS (2002) conference.10.1002/seup.200211106 Search in Google Scholar

[2]Kensall D. Wise, Integrated sensors, MEMS, and microsystems: Reflections on a fantastic voyage, Sensors and Actuators A 136 (2007) 39–5010.1016/j.sna.2007.02.013 Search in Google Scholar

[3]K. D.Mitzner, J. Strnhagen, D. N. Glipeau, Development of micromachined hazardous gas sensor array, Sensors and actuators B 93 (2003) 92-99.10.1016/S0925-4005(03)00244-2 Search in Google Scholar

[4]J.S. Suehle, R.E. Cavicchi, M. Gaitan, S. Semancik, Tin oxide gas sensor fabricated using CMOS micro-hotplates and in situ processing, IEEE Electron. Device Lett. 14 (3) (1993) 118–120.10.1109/55.215130 Search in Google Scholar

[5]S. Semancik, R.E. Cavicchi, M. Gaitan, J.S. Suehle, US Patent 5,345,213 (1994). Search in Google Scholar

[6]Figaro Products Catalogue (2006), Figaro gas sensors 2000-series, Figaro Engineering Inc., European Office, Oststrasse 10, 40211 Dusseldorf, Germany. Search in Google Scholar

[7]S. Fung, Z. Tang, P. Chan, J. Sin, P. Cheung, Thermal analysis and design of a microhotplate for integrated gas-sensor applications,Sens. Actuators A 54 (1996) 482-487.10.1016/S0924-4247(97)80008-8 Search in Google Scholar

[8]A. Gotz, I. Grajcia, C. Cane-, E. Lora-Taniayo, M. Horrillo, G. Getino, C. Grajcia, J. Gutierez, A micromachined solid state integrated gas sensor for the detection of aromatic hydrocarbons, Sens. Actuators B 44 (1997) 483-487.10.1016/S0925-4005(97)00171-8 Search in Google Scholar

[9]G. Sberveglieri, W. Hellmich, G. Muller, Silicon hotplates for metal oxide gas sensor elements, Microsyst. Technol. 3 (1997) 183-190.10.1007/s005420050078 Search in Google Scholar

[10]A Low Power MEMS Gas Sensor based on Nanocrystalline ZnO Thin Films for Sensing Methane, P.Bhattacharyya, P.K.Basu, B. Mondal and H. Saha, Microelectronics Reliability 48 (2008) 1772–1779.10.1016/j.microrel.2008.07.063 Search in Google Scholar

[11]M.Blaschke, T. Tille, P.Robertson, S. Mair, U.Weimar, .H. Ulmer, MEMS GasSensor Array for Monitoring the Perceived Car-Cabin Air Quality, IEEE SENSORS JOURNAL, 6, no 5 (2006) 1298-1308. Search in Google Scholar

[12]M. Afridi, A. Hefner, D. Berning, C. Ellenwood, A. Varma, B. Jacob, S. Semancik, MEMS-based embedded sensor virtual components for system-on-a-chip (SoC), SolidState Electronics 48 (2004) 1777–1781.10.1016/j.sse.2004.05.012 Search in Google Scholar

[13]Nanocrystalline ZnO based MEMS Gas Sensors with CMOS ASIC for Mining Appplications, N.Futane, P.Bhattacharyya, S.Barma, C. Roychaudhuri and H.Saha, International Journal on Smart Sensing and Intelligent Systems, 1(2) (2008) 430-442.10.21307/ijssis-2017-299 Search in Google Scholar

[14]Graf, M., Barrettino, D., Zimmermann, M., Hierlemann, A., Baltes, H., Hahn, S., Barsan, N., Weimar, U, CMOS monolithic metal-oxide sensor system comprising a microhotplate and associated circuitry, IEEE Sensors Journal 4, Issue1, (2004) 9-6.10.1109/JSEN.2003.820367 Search in Google Scholar

[15]G. C. Cardinali, L. Dori, M. Fiorini, I. Sayago, G. Faglia, C. Perego, G. Sberveglieri, V. Liberali, F. Malobertiand D. Tonietto, “A Smart Sensor System for carbon Monoxide Detection”, Analog Integrated Circuits and Signal Processing, vol.14, pp.275-296,1997.10.1023/A:1008250204824 Search in Google Scholar