Microstructuring of SU-8 Resist for MEMS and Bio-Applications

1.J-H Park, M.G. Allen, and M.R. Prausnitr, “Biodegradable polymer microneedles: fabrication, mechanics and transdermal drug delivery”, J. of Controlled Release, vol. 104, pp. 51-66, 2005.10.1016/j.jconrel.2005.02.002 Search in Google Scholar

2.Joseph C. Doll, Nahid Harjee, Nathan Klejwa, Ronald Kwon, Sarah M. Coulthard, Bryan Petzold, Miriam B. Goodman and Beth L. Pruitt, “SU-8 force sensing pillar arrays for biological measurements”, Lab Chip, vol. 9, pp. 1449 - 1454, DOI: 10.1039/b818622g, 200910.1039/b818622g Search in Google Scholar

3.Masaya Miyazaki and Hideaki Maeda,” Microchannel enzyme reactors and their applications for processing”, Trends in Biotechnology, Vol. 24 No. 10, 2006.10.1016/j.tibtech.2006.08.002 Search in Google Scholar

4.Seok Pil Jang, Stephen U.S. Choi, “Cooling performance of microchannel heat sink with nanofluids”, Applied Thermal Engg. Vol. 26 , pp. 2457-2463, (2006)10.1016/j.applthermaleng.2006.02.036 Search in Google Scholar

5.Lorentz H, DespontM, Fahrni N, LaBlance N, Renaud P “SU-8: a low cost negative resist for MEMS “,J. Micromech.Microeng. pp.7121, 199710.1088/0960-1317/7/3/010 Search in Google Scholar

6.D.P. Acharya, “Geometrical Optics for Advanced Students”, Oxford & IBH Publishing Co. Pvt. Ltd., New Delhi, 1987. Search in Google Scholar

7.J.C. McDonald, G.M. Whitesides,”Poly (dimethylsiloxane) as a Material for Fabricating Microfluidic Devices,” Accounts of Chemical Research, Vol.53 no 7, pp 491-499, July 2002.10.1021/ar010110q Search in Google Scholar

8.Lorentz H, Laudon M and Renaud P “Mechanical characterisation of a new high-aspect- ratio near UV resist”, Microelectron. Eng.vol. 371, pp. 41-42, 199810.1016/S0167-9317(98)00086-0 Search in Google Scholar

9.Zhang J, Tan K L, Hong G D, Yang L J and Gong H Q”Polymerisation optimisation of SU- 8 photoresist and its applications in microfluidic systems and MEMS”, J. Micromech.Microeng. vol. 11, pp. 20, 200110.1088/0960-1317/11/1/304Search in Google Scholar