Thampi Paul P, Vijin Jenius S and Sasikumar M, “Characterization and Nonlinearity compensation of Capacitive sensing MEMS accelerometer for launch vehcle applications,” in Proceedings of the National Society for Insturmentation of ISOI (NSI-30), 2005, pp. 417-421.Search in Google Scholar
Hsu & Tai-Ran, “MEMS and Microsystems-Design and Manufacture,” Tata McGraw-Hill, New Delhi, 2002Search in Google Scholar
Thampi Paul, Roy Paul V and Sasikumar M, “Design and Analysis of High performance differential capacitance readout circuit for Navigational grade MEMS accelerometer,” in Proceedings of the National Society for Instrumentation of ISOI (NSI-30), 2005, pp. 410-416.Search in Google Scholar
Fraden, “Hand Book of Modern Sensors-Physics, Design and Application,” Springer, New York 2004Search in Google Scholar