Nanocrystalline ZnO based MEMS Gas Sensors with CMOS ASIC for Mining Applications

1Hagleitner. C, Hierlemann A, Lange D, Kummer A, Kerness N, Brand O, Baltes H, Smart single chip gas sensor microsystem, Nature 200110.1038/35104535Search in Google Scholar

2Hierlemann A, Koll A, Lange D, Hagleitner. C,Kerness N, Brand O, Baltes H, Application-specific sensor system based on CMOS chemical microsensors, Sensors and actuators B 70 (2000) 2-11.10.1016/S0925-4005(00)00546-3Search in Google Scholar

3Hagleitner. C, Lange D, Kerness N, Kummer A, Song W H, Hierlemann A, Brand O, Baltes H, CMOS single chip multisensor gas detection system,Proc. IEEE MEMS (2002) conference.10.1002/seup.200211106Search in Google Scholar

4K. Chatterjee, S. Chatterjee, A. Banerjee, M. Raut, N. C. Pal, A. Sen, H. S. Maiti, The effect of palladium incorporation on methane sensitivity of antimony doped tin oxide, Materials Chemistry and Physics 81 (2003) 33-38.10.1016/S0254-0584(03)00145-7Search in Google Scholar

5S. H. Hahn, N. Barsan and U. Weimar, Investigation of CO/CH4 mixture measured with differently doped SnO2 sensors, Sensors and Actuators B 78 (2001) 64-68.10.1016/S0925-4005(01)00792-4Search in Google Scholar

6D.Kohl, Function and application of gas sensors, J.Phys.D:Appl.Phys. 34(2001) R125-R14910.1088/0022-3727/34/19/201Search in Google Scholar

7Figaro Products Catalogue (2006), Figaro gas sensors 2000-series, Figaro Engineering Inc., European Office, Oststrasse 10, 40211 Dusseldorf, GermanySearch in Google Scholar

8K. D.Mitzner, J. Strnhagen, D. N. Glipeau, Development of micromachined hazardous gas sensor array, Sensors and Actuators B 93 (2003) 92-99.10.1016/S0925-4005(03)00244-2Search in Google Scholar

9P. Bhattacharyya, P. K. Basu, H. Saha, S Basu, Fast Response Methane Sensor using Nanocrystalline Zinc Oxide Thin Films Derived by Sol-Gel method, Sensors and Actuators B 124 (2007) 62-67.10.1016/j.snb.2006.11.046Search in Google Scholar

10K. Wongcharee, M. Brungs, R. Chaplin, R. Pillar, Y.-J. Hong, E. Sizgek, J. Australasian Ceramic Soc.37 (2001) 1. [11]: M.Blaschke, T. Tille, P.Robertson, S. Mair, U.Weimar, .H. Ulmer, MEMS Gas-Sensor Array for Monitoring the Perceived Car-Cabin Air Quality, IEEE SENSORS JOURNAL, 6, no 5 (2006) 1298-1308.Search in Google Scholar

12M. Afridi, A. Hefner, D. Berning, C. Ellenwood, A. Varma, B. Jacob, S. Semancik, MEMS-based embedded sensor virtual components for system-on-a-chip (SoC), Solid-State Electronics 48 (2004) 1777–1781.10.1016/j.sse.2004.05.012Search in Google Scholar

13Graf, M., Barrettino, D., Zimmermann, M., Hierlemann, A., Baltes, H., Hahn, S., Barsan, N., Weimar, U, CMOS monolithic metal-oxide sensor system comprising a microhotplate and associated circuitry, IEEE Sensors Journal 4, Issue1, (2004) 9-6.10.1109/JSEN.2003.820367Search in Google Scholar

14G. C. Cardinali, L. Dori, M. Fiorini, I. Sayago, G. Faglia, C. Perego, G. Sberveglieri, V. Liberali, F. Malobertiand D. Tonietto, “A Smart Sensor System for carbon Monoxide Detection”, Analog Integrated Circuits and Signal Processing, vol.14, pp.275-296,199710.1023/A:1008250204824Search in Google Scholar

15http//www.linear-tech.com/(constant current source IC LM334S8)Search in Google Scholar

16R. Jacob, Harry W. Li and David E. Boyce “ CMOS circuit design,layout, and simulation” IEEE press 2005.Search in Google Scholar

17Phillip E. Allen and Douglas R. Holberg “ CMOS Analog Circuit Design” Oxford University press 2004.Search in Google Scholar

18SmartRF CC2500 Preliminary Data Sheet 2005.Search in Google Scholar

19Zhi-Ming Lin, Kuei-Chen Huang, Jun-Da Chen, And Mei-Yuan Liao, “A CMOS Voltage-Controlled Oscillator With Temperature Compensated”, The Second IEEE Asia Pacific Conference on ASICs, pp.85-86, 2000.Search in Google Scholar

20Liang Dai and Ramesh Harjani, “A Low-Phase-Noise CMOS Ring Oscillator With Differential Control And Quadrature Outputs” IEEE International Symposium on Circuits and System,,pp.134-138,2001Search in Google Scholar