<abstract xmlns="http://www.w3.org/1999/xhtml"><p> We report on investigations of how fast changes of the refractive index influence the uncertainty of interferometric displacement measurements. Measurement of position within a limited range is typical for precise positioning of coordinate measuring systems, such as nanometrology standards combined with scanning probe microscopy (SPM). The varying refractive index of air contributes significantly to the overall uncertainty; it plays a role especially in case of longer-range systems. In our experiments we have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path and play a significant role only over distances longer than 50 mm. Thus, we found that over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems</p></abstract>

We report on investigations of how fast changes of the refractive index influence the uncertainty of interferometric displacement measurements. Measurement of position within a limited range is typical for precise positioning of coordinate measuring systems, such as nanometrology standards combined with scanning probe microscopy (SPM). The varying refractive index of air contributes significantly to the overall uncertainty; it plays a role especially in case of longer-range systems. In our experiments we have observed that its fast variations, seen as length noise, are not linearly proportional to the measuring beam path and play a significant role only over distances longer than 50 mm. Thus, we found that over longer distances the length noise rises proportionally. The measurements were performed under conditions typical for metrology SPM systems

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Institute of Scientific Instruments, Academy of Sciences of the Czech Republic, Královopolská 147, 612 64 Brno, Czech Republic

Measurement Science Review

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

We report on investigations of how fast changes of the refractive index influence the uncertainty of interferometric displacement measurements. Measurement of...

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Publicado en línea: 29 oct 2015

Páginas: 263 - 267

Recibido: 31 mar 2015

Aceptado: 07 oct 2015

DOI: https://doi.org/10.1515/msr-2015-0036

Palabras clave
Nanometrology, interferometry, refractive index of air

© by Miroslava Holá

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Contribution of the Refractive Index Fluctuations to the Length Noise in Displacement Interferometry

Publicado en línea: 29 oct 2015

Páginas: 263 - 267

Recibido: 31 mar 2015

Aceptado: 07 oct 2015

DOI: https://doi.org/10.1515/msr-2015-0036

Palabras claveNanometrology, interferometry, refractive index of air

© by Miroslava Holá

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Palabras clave
Nanometrology, interferometry, refractive index of air