Morphology and photoresponse of crystalline antimony film grown on mica by physical vapor deposition
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12 sept 2016
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Categoría del artículo: Research Article
Publicado en línea: 12 sept 2016
Páginas: 591 - 596
Recibido: 01 dic 2016
Aceptado: 03 jul 2016
DOI: https://doi.org/10.1515/msp-2016-0084
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© 2016 Muhammad Shafa et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.
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Summary of the growth conditions and vapor concentration in furnace tube of PVD reactor (Source temperature 900 °C, growth temperature 441 °C, source before deposition: 0_1044 g, after deposition: 0_000 g)_
Time [min] | 1 | 5 | 8 | 13 | 18 | 23 | 33 | 46 | 66 | 71 | 76 | 81 | 86 | 91 | 160 |
Temp. [°C] | 300 | 450 | 600 | 770 | 900 | 900 | 900 | 900 | 900 | 900 | 900 | 800 | 700 | 600 | 300 |
Pressure 0.1 Pa | 1.4 | 1.4 | 1.4 | 1.4 | 1.4 GFC GFC: Growth Flow Condition | 1.4 | 1.0 | 1.0 | 8.6 | 8.6 | 7.4 | 7.4 | 7.4 | 8.6 | 1.4 |