<abstract xml:lang="en" xmlns="http://www.w3.org/1999/xhtml"><p>A new scatterometer is composed of two ellipsoidal mirrors of revolution and an optical detection system. It enables us to absolutely measure diffuse reflectance and transmittance and to measure the spatial distribution of light scattering from almost all materials. The optical detection system has been developed both to measure total photo-intensity using a photodiode and to capture the imaging data using a CCD camera. This results in faster, more complete and often more accurate measurements than can be achieved with traditional goniometric methods and integrated sphere methods. The absolute total integrated reflectance and transmittance of well-known samples were measured and the spatial distribution of light scattering from a diffraction grating was captured and evaluated.</p></abstract>

A new scatterometer is composed of two ellipsoidal mirrors of revolution and an optical detection system. It enables us to absolutely measure diffuse reflectance and transmittance and to measure the spatial distribution of light scattering from almost all materials. The optical detection system has been developed both to measure total photo-intensity using a photodiode and to capture the imaging data using a CCD camera. This results in faster, more complete and often more accurate measurements than can be achieved with traditional goniometric methods and integrated sphere methods. The absolute total integrated reflectance and transmittance of well-known samples were measured and the spatial distribution of light scattering from a diffraction grating was captured and evaluated.

New Scatterometer for Spatial Distribution Measurements of Light Scattering from Materials

AIST, 1-1-1, Tsukuba Central 2, Umezono, Tsukuba, Ibaragi 305-8568, Japan

Institute of Measurement Science, Slovak Academy of Sciences, Bratislava, Slovakia

TRAS, Inc., 725-28 Shimohirooka, Tsukuba, Ibaragi 305-0042, Japan

Measurement Science Review

A new scatterometer is composed of two ellipsoidal mirrors of revolution and an optical detection system. It enables us to absolutely measure diffuse...

New Scatterometer for Spatial Distribution Measurements of Light Scattering from Materials

Online veröffentlicht: 19. Apr. 2012

Seitenbereich: 56 - 61

DOI: https://doi.org/10.2478/v10048-012-0012-y

Schlüsselwörter
STAR GEM®, CCD camera, fish-eye lens, absolute reflectance, bi-directional reflection distribution function, total integrated reflectance

This content is open access.

New Scatterometer for Spatial Distribution Measurements of Light Scattering from Materials

Online veröffentlicht: 19. Apr. 2012

Seitenbereich: 56 - 61

DOI: https://doi.org/10.2478/v10048-012-0012-y

SchlüsselwörterSTAR GEM®, CCD camera, fish-eye lens, absolute reflectance, bi-directional reflection distribution function, total integrated reflectance

This content is open access.

Schlüsselwörter
STAR GEM®, CCD camera, fish-eye lens, absolute reflectance, bi-directional reflection distribution function, total integrated reflectance