<abstract xml:lang="en" xmlns="http://www.w3.org/1999/xhtml"><p>An application of ultrasonic interferometry is proposed and investigated as a new possible technique for high-accuracy linear and angular measurements. The basic principle of the proposed technique is the use of coherent running acoustic wave propagation along homogeneous solid waveguide in the capacity of linear measuring scale. The RMS sensitivity to the linear drift of 0.5 μm and RMS error of absolute measurement of ± 12 μm over the distance up to one meter have been achieved experimentally.</p></abstract>

An application of ultrasonic interferometry is proposed and investigated as a new possible technique for high-accuracy linear and angular measurements. The basic principle of the proposed technique is the use of coherent running acoustic wave propagation along homogeneous solid waveguide in the capacity of linear measuring scale. The RMS sensitivity to the linear drift of 0.5 μm and RMS error of absolute measurement of ± 12 μm over the distance up to one meter have been achieved experimentally.

Ultrasonic Interferometer for High-Accuracy Linear Measurements

Institute of Radioengineering and Electronics, Fryazino Department (FIRE RAS), Russian Academy of Sciences, Vvedenskogo sq.1, Fryazino, Moscow region, 141190, Russia

Measurement Science Review

{"article-title":"Ultrasonic Interferometer for High-Accuracy Linear Measurements"}

An application of ultrasonic interferometry is proposed and investigated as a new possible technique for high-accuracy linear and angular measurements. The...

Ultrasonic Interferometer for High-Accuracy Linear Measurements

Online veröffentlicht: 23. Dez. 2009

Seitenbereich: 187 - 188

DOI: https://doi.org/10.2478/v10048-009-0031-5

Schlüsselwörter
ultrasound, interferometer, linear measurements, quartz fiber

This content is open access.

Ultrasonic Interferometer for High-Accuracy Linear Measurements

Online veröffentlicht: 23. Dez. 2009

Seitenbereich: 187 - 188

DOI: https://doi.org/10.2478/v10048-009-0031-5

Schlüsselwörterultrasound, interferometer, linear measurements, quartz fiber

This content is open access.

Schlüsselwörter
ultrasound, interferometer, linear measurements, quartz fiber