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Improving optical and morphological properties of Mn-doped ZnO via Ar ion sputtering followed by high-temperature UHV annealing

Elhachemi Zehar
Elhachemi Zehar
, 
Abdallah Ouerdane
Abdallah Ouerdane
, 
Boualem Chetti
Boualem Chetti
 und 
Ali Çoruh
Ali Çoruh
   | 29. Nov. 2023
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Online veröffentlicht: 29. Nov. 2023
Seitenbereich: 325 - 338
Eingereicht: 22. März 2023
Akzeptiert: 17. Sept. 2023
DOI: https://doi.org/10.2478/msp-2023-0024
Schlüsselwörter
© 2023 Elhachemi Zehar et al., published by Sciendo
This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International License.

Fig. 1.

2D and 3D topographic AFM images accompanied by curves of line profiles corresponding to pure ZnO (a), untreated ZnMnO (b), and treated ZnMnO (c)
2D and 3D topographic AFM images accompanied by curves of line profiles corresponding to pure ZnO (a), untreated ZnMnO (b), and treated ZnMnO (c)

Fig. 2.

XRD spectra of undoped ZnO and treated ZnMnO With six pics (100), (002), (101), (102), (110) and (103)
XRD spectra of undoped ZnO and treated ZnMnO With six pics (100), (002), (101), (102), (110) and (103)

Fig. 3.

Size-strain analysis (W-H plot) for ZnO and ZnMnO
Size-strain analysis (W-H plot) for ZnO and ZnMnO

Fig. 4.

XPS spectra of pure ZnO (i), initial ZnMnO (ii), ZnMnO post Ar ion sputtering (iii), and ZnMnO post Ar annealing at 800°C (iv). (a): full scan spectra. (b), (c), (d), and (e): narrow scan spectra corresponding to C 1s, doubled Zn 2p, O 1s, and doubled Mn 2p, respectively
XPS spectra of pure ZnO (i), initial ZnMnO (ii), ZnMnO post Ar ion sputtering (iii), and ZnMnO post Ar annealing at 800°C (iv). (a): full scan spectra. (b), (c), (d), and (e): narrow scan spectra corresponding to C 1s, doubled Zn 2p, O 1s, and doubled Mn 2p, respectively

Fig. 5.

Gaussian deconvolution of high-resolution XPS spectrum of: (a) doubled Mn 2p corresponding to treated ZnMnO(final state); and (b) O 1s corresponding to ZnMnO (untreated, annealed)
Gaussian deconvolution of high-resolution XPS spectrum of: (a) doubled Mn 2p corresponding to treated ZnMnO(final state); and (b) O 1s corresponding to ZnMnO (untreated, annealed)

Fig. 6.

PL spectra of pure ZnO (i), untreated ZnMnO (ii), and treated ZnMnO (iii)
PL spectra of pure ZnO (i), untreated ZnMnO (ii), and treated ZnMnO (iii)

Fig. 7.

Gaussian fitting of PL spectra accompanied by schematic band diagram corresponding to pure ZnO (i), untreated ZnMnO (ii), and treated ZnMnO (iii)
Gaussian fitting of PL spectra accompanied by schematic band diagram corresponding to pure ZnO (i), untreated ZnMnO (ii), and treated ZnMnO (iii)

Structural parameters of ZnO and treated ZnMnO: tabulated XRD spectroscopy results

Sample Peak position (2θ °) hkl FWHM (2θ°) d-spacing (Å) Average grain size D (nm) Cell parameters (Å) c/a Strain (ε)
Scherrer equation W-H Plot a = b c Scherrer equation W-H Plot
ZnO(0%) 31.84 1 00 0.58 2.80 25.20 28.88 3.242 5.195 1.602 0.0014 0.00085
34.50 002 0.33 2.60
36.32 1 0 1 0.30 2.47
47.65 1 02 0.33 1.90
56.68 1 1 0 0.36 1.62
63.02 1 03 0.83 1.47
ZnMnO(4%) 31.70 1 00 0.56 2.82 12.41 12.38 3.256 5.212 1.600 0.0025 0.00122
34.38 002 0.67 2.60
36.17 1 0 1 0.36 2.48
47.56 1 02 0.29 1.91
56.44 1 1 0 0.21 1.63
62.87 1 03 0.30 1.47

Atomic percentages of Zn, O, and Mn elements corresponding to pure ZnO and treated ZnMnO. (a) atomic ratio of the Mn atoms taking the Zn sites. (b) stoichiometry factor of O to Zn and Mn

Sample at(%) Comments
Zn O Mn (a): [Mn][Mn+Zn]×100${{[Mn]} \over {[Mn + Zn]}} \times 100$ (b): [O][Mn+Zn]${{[O]} \over {[Mn + Zn]}}$
ZnO 34.00 66.00 0.00 0.00 1.94
ZnMnO@800°C 22.30 74.04 3.65 14.07 2.85

The main statistical parameters calculated through the AFM images in Figure 1 using Gwyddion software

Sample Maximum height (Zmax) (nm) Median height (Zmed) (nm) Mean roughness (Sa) (nm) Number of grains (N)
ZnO 98.84 60.22 13.50 115
Untreated ZnMnO 198.0 106.46 27.05 152
Treated ZnMnO 288.84 132.52 43.03 126
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