<abstract xmlns="http://www.w3.org/1999/xhtml"><p>Black silicon layers were formed on silicon substrate by the surface structure chemical transfer method and by anodic etching method. Properties of microstructure of formed layers were experimentally studied by the electron microscopy methods (TEM) and characterized by statistical, Fourier and multifractal methods. Theoretical structures with defined fractal properties and surface roughness were generated and their microstructure properties were evaluated. Obtained results were used for the explanation of the real structure development during the forming procedure. By using of this approach, we study the correlation of roughness and fractality with optical properties. Black silicon layers were also investigated by using of Raman scattering method. Optimized theoretical model describing the 1<sup>st</sup> order of black Si Raman scattering profile was constructed and used for evaluation of the biaxial tensile stress introduced during etching procedure.</p></abstract>

Black silicon layers were formed on silicon substrate by the surface structure chemical transfer method and by anodic etching method. Properties of microstructure of formed layers were experimentally studied by the electron microscopy methods (TEM) and characterized by statistical, Fourier and multifractal methods. Theoretical structures with defined fractal properties and surface roughness were generated and their microstructure properties were evaluated. Obtained results were used for the explanation of the real structure development during the forming procedure. By using of this approach, we study the correlation of roughness and fractality with optical properties. Black silicon layers were also investigated by using of Raman scattering method. Optimized theoretical model describing the 1st order of black Si Raman scattering profile was constructed and used for evaluation of the biaxial tensile stress introduced during etching procedure.

Black silicon – correlation between microstructure and Raman scattering

The Institute of Scientific and Industrial Research

Journal of Electrical Engineering

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

{"article-title":"Black silicon \u2013 correlation between microstructure and Raman scattering"}

Black silicon layers were formed on silicon substrate by the surface structure chemical transfer method and by anodic etching method. Properties of...

Black silicon – correlation between microstructure and Raman scattering

Online veröffentlicht: 28. Sept. 2019

Seitenbereich: 58 - 64

Eingereicht: 19. März 2019

DOI: https://doi.org/10.2478/jee-2019-0042

Schlüsselwörter
black silicon, TEM, roughness, fractal properties, Raman scattering

© 2019 Stanislav Jurečka et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Black silicon – correlation between microstructure and Raman scattering

Online veröffentlicht: 28. Sept. 2019

Seitenbereich: 58 - 64

Eingereicht: 19. März 2019

DOI: https://doi.org/10.2478/jee-2019-0042

Schlüsselwörterblack silicon, TEM, roughness, fractal properties, Raman scattering

© 2019 Stanislav Jurečka et al., published by Sciendo

This work is licensed under the Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 License.

Schlüsselwörter
black silicon, TEM, roughness, fractal properties, Raman scattering