The Effect of the Electrode Position on the Dynamic Behavior of an Electrostatically Actuated Microcantilever

Electrostatic actuators have major role in many MEMS devices, e.g. sensors, actuators. The amount of applied voltage to an electrostatic micro-actuator has a direct impact on the amplitude of deflection throughout the cantilever. This research aims to study the effect of the electrode length and the applied voltage on the amplitude of deflection of the micro-cantilever. Also, the resonant frequency for the cantilever was computed for full length and compared with simulation results. Finite element method, ANSYS was used as a simulation tool.