Uneingeschränkter Zugang

Fabrication and Characterization of High Performance Micro Impedance Inclinometer


Zitieren

C. H. Lin, S. M. Kuo, “Micro-impedance inclinometer with wide-angle measuring capability and no damping effect,” Sens. Actuat. A: Phys. vol. 143, pp. 113-119, 2008. Search in Google Scholar

U. Mescheder, S. Majer, “Micromechanical inclinometer,” Sens. Actuat. A: Phys. vol. 60, pp. 134-138, 1997. Search in Google Scholar

R. A. Yotter, R. R. Baxter, S. Ohno, S. D. Hawley, D. M. Wilson, “On a micromachined fluidic inclinometer,” Transducers 2003, USA, pp.12791282, June, 2003.. Search in Google Scholar

I. S. Kang, H. Jung, C. J. Kim, B. J. Kwon, W. J. Kim, S. Y. Choi, J. H. Lee, J. K. Shin, S. H. Kong, “Design and fabrication of a micro electro mechanical systems-based electrolytic tilt sensors,” Jpn. J. Appl. Phys., vol. 45, pp.5626-5630, 2006. Search in Google Scholar

A. Giani, F. Mailly, M. Al Khalfioui, A. Foucaran, A. Boyer, “Micromachined thermal inclinometer based on flash evaporqted Bi0.5Sb1.5Te3(p)/Bi2Se0.3Te2.7(n) thermocouples,” Mater. Sci. Eng. B:Solid vol. 107, pp. 94-98, 2004. Search in Google Scholar

S. Billat, H. Glosch, M. Kunze, F. Hedrich, J. Frech, J. Auber, H. Sandmaier, W. Wimmer, W. Lang, “Micromachined inclinometer withhigh sensitivity and very good stability,” Sens. Actuat. A: Phys. vol. 97/98, pp. 125-130, 2002. Search in Google Scholar

Y. Zhao, J. Yang, B. J. Peng, S. Y. Yang, “Experimental research on a novel fiber-optic cantilever-type inclinometer,” Opt. Laser Technol. Vol. 37, pp. 555-559, 2005. Search in Google Scholar

eISSN:
1178-5608
Sprache:
Englisch
Zeitrahmen der Veröffentlichung:
Volume Open
Fachgebiete der Zeitschrift:
Technik, Einführungen und Gesamtdarstellungen, andere