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Fabrication of High Frequency Surface Acoustic Wave (SAW) Devices for Real Time Detection of Highly Toxic Chemical Vapors


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Ballato, “Piezoelectricity: History and new thrusts,” in Proc. Ultrason. Symp., vol. 1, 1996, pp. 575–583. Search in Google Scholar

D. Morgan, “Surface-Wave Devices for Signal Processing”, Amsterdam, The Netherlands, Elsevier, 1991, pp. 152. Search in Google Scholar

H. Wohltjen, D. Ballantine, R. White, S. Martin, A. Ricco, E. Zellers, and G. Frye, “Acoustic Wave Sensors Theory, Design, and Physico-Chemical Applications”, New York: Academic press, 1997.10.1016/B978-012077460-9/50001-0 Search in Google Scholar

J.W. Gardner, V.K. Varadan, O.O. Awadelkarim, “Microsensors, MEMS, and Smart Devices”, John Wiley& Sons Ltd, Chichester, 2001.10.1002/9780470846087 Search in Google Scholar

D. Matatagui, M. J. Fernandez and J. Forntecha, “Love-wave sensor array to detect, discriminate and classify chemical warfare agent simulants”, Sens. Actuators B Chem., vol.175, 2012, pp. 173–178.10.1016/j.snb.2012.02.061 Search in Google Scholar

K. Uehara, C. M. Yang, T. Shibata, S.-K. Kim, S. Kameda, H. Nakase, et al. “Fabrication of 5-GHz-band SAW filter with atomically-flat-surface AlN on sapphire”, IEEE Ultrasonics Symposium, 2004, pp. 203–206. Search in Google Scholar

J.M. Kontio, J. Simonen, J. Tommila, M. Pessa, “Arrays of metallic nanocones fabricated by UV-nanoimprint lithography”, Microelectron. Eng. vol. 87, 2010, pp. 1711–1715.10.1016/j.mee.2009.08.015 Search in Google Scholar

F. D. Lai and H. M. Huang, “Fabrication of High Frequency and Low-Cost SurfaceAcoustic Wave Filters Using Near Field Phase Shift Photolithography,” Microelectronic Engineering, Vol. 83, No. 4, 2006, pp. 1407-1409.10.1016/j.mee.2006.01.106 Search in Google Scholar

E. Forsén, D. Nilsson, S. Ballandras, E. Mayer, S. Sakharov, “Jet-and-Flash Nano Imprint Lithography: Fabrication of Passive Wireless Surface Acoustic Wave Sensors”, Proceeding Eurosensors XXV, 2011, pp. 860–863.10.1016/j.proeng.2011.12.211 Search in Google Scholar

J.J.K. Kim, S. Paik, F. Herrault, M.G. Allen, “UV-LED lithography for 3-D high aspect ratio microstructure patterning”, 14th Solid State Sensors, Actuators, and Microsystems, Workshop, 2012, pp. 481–484. Search in Google Scholar

J. Liu, S. He, “Fast calculatation of the paramters of SAW coupling-of-modes model”, Chin. J. Acoust. Vol. 26, 2007, pp. 123-127. Search in Google Scholar

L. Fan, H. Ge, S. Zhang, H. Zhang and J. Zhu, “Optimization of sensitivity induced by surface conductivity and sorbed mass in surface acoustic wave gas sensors”. Sens. Actuators B, vol. 161, 2012, pp. 114–123.10.1016/j.snb.2011.09.077 Search in Google Scholar

L. Fan, S. Zhang, H. Ge, and H. Zhang, “Theoretical optimizations of acoustic wave gas sensors with high conductivity sensitivities”, Sens. Actuators B, vol. 171– 172, 2012, pp. 1272–1276.10.1016/j.snb.2012.05.046 Search in Google Scholar

M. Schweyer, J. Hilton, J. Munson, and J. Andle, “A novel monolithic piezoelectric sensor,” in Proc. Ultrason. Symp., vol. 1, 1997, pp. 371–374. Search in Google Scholar

S. Martin et al., “Gas sensing with acoustic devices,” Proc. Ultrason. Symp., vol. 1, 1996, pp. 423–434. Search in Google Scholar

R. Kshetrimayum, R. D. S. Yadava, and R. P. Tandon, “Modeling electrical response of polymer-coated SAW resonators by equivalent circuit representation.,” Ultrasonics, vol. 51, no. 5, Jul. 2011, pp. 547–553,10.1016/j.ultras.2010.12.00621236460 Search in Google Scholar

S. Thomas, S. L. T. Leong, Z. Rácz, M. Cole, and J. W. Gardner, “Design and Implementation of a High-Frequency Surface Acoustic Wave Sensor Array for Pheromone Detection in an Insect-inspired Infochemical Communication System,” 14th International Meeting on Chemical Sensors, 2012, pp. 11–14, Search in Google Scholar

H. Wohltjen, “Surface acoustic wave microsensors,” Proc. 4th Int. Solid-State Sens. Actuators Conf., 1987, pp. 471–477. Search in Google Scholar

J. Grate, S. Martin, and R. White, “Acoustic wave microsensors,” Anal. Chem., vol. 65, no. 21, 1993, pp. 940–948.10.1021/ac00069a728 Search in Google Scholar

J.W. Grate, “Hydrogen-bond acidic polymers for chemical vapor sensing”. Chem. Rev., vol. 108, 2008, pp. 726-745.10.1021/cr068109y18220425 Search in Google Scholar

C.Wold et al., “Temperature measurement using surface skimming bulk waves,” Proc. Ultrason. Symp., vol. 1, 1999, pp. 441–444. Search in Google Scholar

D. Cullen and T. Reeder, “Measurement of SAW velocity versus strain for YX and ST quartz,” in Proc. Ultrason. Symp., 1975, pp. 519–522.10.1109/ULTSYM.1975.196575 Search in Google Scholar

D. Cullen and T. Montress, “Progress in the development of SAW resonator pressure ransducers,” in Proc. Ultrason. Symp., vol. 2, 1980, pp. 519–522.10.1109/ULTSYM.1980.197489 Search in Google Scholar

A. Pohl, G. Ostermayer, L. Reindl, and F. Seifert, “Monitoring the tire pressure at cars using passive SAW sensors,” Proc. Ultason. Symp., vol. 1, 1997, pp. 471–474. Search in Google Scholar

A. Lonsdale, “Method and apparatus for measuring strain,” U.S. Patent 585 571, Dec. 17, 1996. Search in Google Scholar

W. Bowers, R. Chuan, and T. Duong, “A 200 MHz surface acoustic wave resonator mass microbalance,” Rev. Sci. Instrum., vol. 62, no. 6, 1991, pp. 1624–1629.10.1063/1.1142442 Search in Google Scholar

V.B. Raj, H. Singh, A.T. Nimal, M.U. Sharma, M. Tomar and V. Gupta, “Origin and role of elasticity in the enhanced DMMP detection by ZnO/SAW sensor” Sensors and Actuators B:Chemical, vol. 207, 2015, pp.375-38210.1016/j.snb.2014.10.015 Search in Google Scholar

K.Vetelino, P. Story, R. Mileham, and D. Galipeau, “Improved dewpoint measurements based on a SAW sensor,” Sens. Actuators B, Chem., vol. 35-36, 1996, pp. 91–98.10.1016/S0925-4005(96)02020-5 Search in Google Scholar

J. Cheeke, N. Tashtoush, and N. Eddy, “Surface acoustic wave humidity sensor based on the changes in the viscoelastic properties of a polymer film,” Proc. Ultrason. Symp., vol. 1, 1996, pp. 449–452. Search in Google Scholar

E. Radeva and I. Avramov, “Humidity sensing properties of plasma polymer coated surface transverse wave resonators,” in Proc. Ultrason. Symp., vol. 1, 1998, pp. 509– 512. Search in Google Scholar

L. Reindl, C. Ruppel, A. Kirmayr, N. Stockhausen, and M. Hilhorst, “Passive radio requestable SAW water content sensor,” Proc. Ultrason. Symp., vol. 1, 1999, pp. 461– 466.10.1109/ULTSYM.1999.849440 Search in Google Scholar

M. Vellekoop and B. Jakoby, “A love-wave ice detector,” Proc. Ultrason. Symp., vol. 1, 1999, pp. 453–456. Search in Google Scholar

H. Wohltjen and R. Dessy, “Surface acoustic wave probe for chemical analysis I: Introduction and instrument design,” Anal. Chem., vol. 51, no. 9, 1979, pp. 1458– 1475.10.1021/ac50045a024 Search in Google Scholar

E. Staples, “Electronic nose simulation of olfactory response containing 500 orthogonal sensors in 10 seconds,” Proc. Ultrason. Symp., vol. 1, 1999, pp. 417–423.10.1109/ULTSYM.1999.849432 Search in Google Scholar

H. Singh, V. B. Raj, J. Kumar, U. Mittal, M. Mishra, A.T. Nimal, M.U. Sharma, and V. Gupta, “Metal oxide SAW E-nose employing PCA and ANN for the identification of binary mixture of DMMP and methanol”, Sensors and Actuators B, vol. 2004, 2014, pp. 147-156. Search in Google Scholar

Asif I. Zia, S. C. Mukhopadhyay, Pak-Lam Yu, I.H. Al-Bahadly, Chinthaka P. Gooneratne, Jürgen Kosel, “Rapid and Molecular selective electrochemical sensing of phthalates in aqueous solution” Biosensors and Bioelectronics, 67:342-349 15 May 201510.1016/j.bios.2014.08.05025218198 Search in Google Scholar

A.T. Nimal, M. Singh, U. Mittal, and R.D.S. Yadava, “A comparative analysis of one port colpitt and two port pierce oscillators for DMMP vapour sensing”, Sensors and Actuators B, vol. 114, 2006, pp. 316-325.10.1016/j.snb.2005.05.021 Search in Google Scholar

V.B. Raj, H. Singh, A.T. Nimal, M.U. Sharma, and V. Gupta, “Oxide thin films (ZnO, TeO2, SnO2, and TiO2) based surface acoustic wave (SAW) E-nose for the detection of chemical warfare agents”, Sensors and Actuators B, vol. 178, 2013, pp.636-647.10.1016/j.snb.2012.12.074 Search in Google Scholar

V.B. Raj, A.T. Nimal, Y. Parmar, M.U. Sharma, K. Sreenivas and V. Gupta, “Crosssensitivity and selectivity studies on ZnO surface acoustic wave ammonia sensor”, Sensors and Actuators B, vol. 147, 2010, pp. 517–524.10.1016/j.snb.2010.03.079Search in Google Scholar

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